The possibility of micro and high functional processings by metal powder injection molding (MIM) which uses effectively polymeric materials for enhancing both mold-ability and shape-retention were introduced. Sacrificial plastic mold inserted metal injection molding (SPiMIM) was developed to overcome some problems facing the realization of μ-MIM process. The molds were manufactured by LIGA process. Two types of transcription methods were adopted in LIGA/μ-SPiMIM process to obtain the sintered parts with multi pillars or fluidic channels. The effects of particle size on the quality of micro-structured parts were also investigated.