Retarding Field Energy Analyzer Research Articles

Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr1-x-Alx-N Thin Films.

Cr-Al-N thin film materials libraries were synthesized by combinatorial reactive high power impulse magnetron sputtering (HiPIMS). Different HiPIMS repetition frequencies and peak power densities were applied altering the ion to growth flux ratio. Moreover, time-resolved ion energy distribution functions were measured with a retarding field energy analyzer (RFEA). The plasma properties were measured during the growth of films with different compositions within the materials library and correlated to the resulting film properties such as phase, grain size, texture, indentation modulus, indentation hardness, and residual stress. The influence of the ion to growth flux ratio on the film properties was most significant for films with high Al-content (xAl = 50 at. %). X-ray diffraction with a 2D detector revealed hcp-AlN precipitation starting from Al-concentration xAl ≥ 50 at. %. This precipitation might be related to the kinetically enhanced adatom mobility for a high ratio of ions per deposited atoms, leading to strong intermixing of the deposited species. A structure zone transition, induced by composition and flux ratio JI/JG, from zone T to zone Ic structure was observed which hints toward the conclusion that the combination of increasing flux ratio and Al-concentration lead to opposing trends regarding the increase in homologous temperature.

Study and design of a lens-type retarding field energy analyzer without a grid electrode

A retarding field energy analyzer (RFEA) for measuring the energy distribution of charged particles offers the advantages of a simple structure and suitability for simultaneous observations of beam patterns in two dimensions. In this study, lens-based RFEAs without a grid electrode were theoretically investigated with regard to the geometry and lens condition to achieve high performance. The simulation results show that the proposed RFEA can achieve a resolution of 2.6 meV at an energy level of 500 eV. In addition, performance, which is the ratio of the resolution to the beam energy, reached 5.2×10−6. These results indicate that the RFEA designed in this study is capable of high-performance outcomes. The findings here demonstrate that the most important factors when attempting to realize a high-resolution RFEA design are to reduce the sagging effect of the electron beam through the focusing lens and ensure that V″(z) in the retarding electrode is close to zero. The design of the lens-based RFEAs is described in detail.

Probe diagnostics of the plasma plume created by a magnetic nozzle of an inductively coupled plasma source

The Air-Breathing Helicon Plasma Thruster, a thruster utilizing ambient air which is suggested to support small spacecraft on very low Earth’s orbits, has been tested successfully. Using a retarding field energy analyser and Langmuir probe, the specific impulse have been confirmed for operating conditions of 1.5 mg·s−1 of air, 50 mPa gas pressure, 120 W of radio-frequency forward power at 13.56 MHz, and a maximum axial magnetic field of 200 G at the 200 km attitude. The inductively coupled plasma and ion beam formed have been characterized axially, and the measured beam velocity is about 1100 km·s−1 for these conditions.

Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

A knowledge-based understanding of the plasma-surface-interaction with the aim to precisely control (reactive) sputtering processes for the deposition of thin films with tailored and reproducible properties is highly desired for industrial applications. In order to understand the effect of plasma parameter variations on the film properties, a single plasma parameter needs to be varied, while all other process and plasma parameters should remain constant. In this work, we use the Electrical Asymmetry Effect in a multi-frequency capacitively coupled plasma to control the ion energy at the substrate without affecting the ion-to-growth flux ratio by adjusting the relative phase between two consecutive driving harmonics and their voltage amplitudes. Measurements of the ion energy distribution function and ion flux at the substrate by a retarding field energy analyzer combined with the determined deposition rate Rd for a reactive Ar/N2 (8:1) plasma at 0.5 Pa show a possible variation of the mean ion energy at the substrate Emig within a range of 38 and 81 eV that allows the modification of the film characteristics at the grounded electrode, when changing the relative phase shift θ between the applied voltage frequencies, while the ion-to-growth flux ratio Γig/Γgr can be kept constant. AlN thin films are deposited and exhibit an increase in compressive film stress from −5.8 to −8.4 GPa as well as an increase in elastic modulus from 175 to 224 GPa as a function of the mean ion energy. Moreover, a transition from the preferential orientation (002) at low ion energies to the (100), (101) and (110) orientations at higher ion energies is observed. In this way, the effects of the ion energy on the growing film are identified, while other process relevant parameters remain unchanged.

Angular and Energy Distributions of K+ and I– Ions in Dissociation of KI Molecules at a Diamond Surface

Scattering of K+ and I– ions in surface-induced dissociation of KI molecules at a diamond (110) target has been studied using the molecular beam techniques. The angular and energy distributions of the positive and negative ions were measured by a time-of-flight detector with a retarding field energy analyzer. The incident KI beam energy was equal to 12 eV while the target surface temperature was 250°C. The angular distributions of the K+ ions we observed exhibited maxima at scattering angles smaller than the specular reflection ones, in contrast to the I– ion distributions where the maxima were shifted to larger angles. The intensities of scattering of both the ions at the maxima of the distributions increased as the incident angles of the beam grew. The energy distributions of the positive and negative ions have turned out to be identical which may indicate the mechanism of rapid non-statistical dissociation of the molecules upon an impact on the target surface.

Nearly monoenergetic positive ion beam with self-neutralized space charge extracted from a pulsed plasma

A nearly monoenergetic Ar+ ion beam (100 eV peak energy, 3.5 eV full width at half maximum), with self-neutralized space charge, was extracted from a power modulated (pulsed) inductively coupled plasma (ICP), through a single grounded grid. The beam energy was set by applying a synchronous DC bias voltage to a boundary electrode in contact with the plasma, in the late afterglow of the power pulse. A retarding field energy analyzer and a movable Faraday cup were used to measure the ion energy distribution (IED) and the time resolved ion and electron current densities, as a function of position along the beam axis, to unravel the mechanism of self-neutralization of the space charge of the beam. When a +100 V DC bias was applied to the boundary electrode during the afterglow, a ~100 eV beam (ion density ~109 cm−3) emerged that was space-charge neutralized by periodic injection of electrons, mainly during the early afterglow, into the region downstream of the extraction grid. A background plasma (electron density ~1010 cm−3) was formed by these electrons, in conjunction with relatively low-energy ions (1–10 eV) that flew out of the ICP when the DC bias was off, as well as formed by resonant charge exchange of the 100 eV beam ions with the background Ar in the downstream region near the extraction grid. The behavior of the beam IED as a function of pressure and power of the ICP as well as the timing of application of the DC bias voltage was also studied.

Effect of permanent magnets on plasma confinement and ion beam properties in a double layer helicon plasma source

The work described in this article was carried out to investigate how permanent magnets (PM) affect the plasma confinement and ion beam properties in an inductively coupled plasma which expands from a helicon source. The cylindrical plasma device Njord has a 13 cm long and 20 cm wide stainless steel port connecting the source chamber and the diffusion chamber. The source chamber has an axial magnetic field produced by two coils, with magnetic field lines expanding into the diffusion chamber. Simulations have shown that the field lines leaving the edge of the source hit the port wall, causing a loss of electrons in this section. In the experiments performed in this work, PMs were added around the port walls near the exit of a plasma source and the effect was investigated experimentally by means of a retarding field energy analyser probe. The plasma potential, ion density and ion beam parameters were estimated, and the results with and without the PMs were compared. The results showed that the plasma density in the centre can in some cases be doubled, and the density at the edges of the plasma increased significantly with PMs in place. Although the plasma potential was slightly affected, and the beam velocity dropped by ${\sim}$ 10 %, the ion beam flux increased by a factor of 1.5.

Ion energy and angular distributions in planar Ar/O2 inductively coupled plasmas: hybrid simulation and experimental validation

A hybrid model, which consists of a fluid module, a sheath module and an ion Monte Carlo module, is employed to investigate the dependence of ion energy and angular distributions (IEDs and IADs) on the inductively coupled plasma (ICP) power, pressure, gas ratio, bias power and bias frequency in Ar/O2 discharges. The results indicate that the bimodal distribution appears as bias power increases or bias frequency decreases. Moreover, the low and high energy peaks of IEDs move to higher energy with the rise of bias power and O2 content. Whereas, an opposite tendency is observed with the increase of ICP power and pressure. For IADs, it is clear that a larger percentage of ions incident on the electrode have a smaller deflection angle by increasing bias power or decreasing pressure, and a similar evolution is observed with the decline of bias frequency. Besides, the better collimation of ions is obtained at larger O2 concentration, but ICP power only has little influence on IADs. In order to validate the model, a comparison between the simulated IEDs and those measured by a retarding field energy analyzer has been done, and shows a good agreement. The results obtained in this work could help us to gain more insight into the dependence of IEDs and IADs on the discharge parameters, which is of significant importance in the improvement of the etching rate and anisotropy.

Design and calibration of a retarding field energy analyzer for the LTX-β scrape off layer and modeling of electrostatic potential in a collisionless SOL

Abstract The Lithium Tokamak eXperiment (LTX) is a spherical tokamak device designed to study lithium plasma facing components (PFCs). The lithium coated wall of LTX has been demonstrated to produce a plasma edge with high electron temperature (200 eV or greater). Plasma density in the outer scrape-off layer (SOL) is also found to be very low, around 2 × 1017m-3, as a result of the low recycling lithium boundary. The high temperature, low collisionality region of the plasma extends into the SOL. The recent upgrade to LTX-β includes installation of a neutral beam, which will provide further heating and fueling of the core plasma. Core and edge diagnostics will also be expanded. As part of this expansion, a Retarding Field Energy Analyzer (RFEA) has been developed for the SOL of LTX-β. Measurements of the ion temperature, ion energy distribution, and the local space potential will be performed in the SOL plasma using this RFEA. Upgraded high field side (HFS) and low field side (LFS) Langmuir probes will replace existing triple probes so that higher electron temperatures can be more reliably measured. The HFS probes are also positioned to give radial and vertical gradient measurements. The design of the RFEA will be presented, along with calibration data. Since a high temperature, low collisional edge is expected for LTX-β, with a high mirror ratio near the LCFS (around 4), the majority of particles in the SOL will be mirror-trapped. Trapped particle effects will therefore become significant in the physics of the SOL plasma, and warrant further theoretical investigations. Here we present a theoretical study of the ambipolar potential formed in the collisionless SOL via differential loss of the electrons and ions, known as the Pastukhov potential in the literature. Numerical results will also be presented.

Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

Plasma-enhanced atomic layer deposition (PEALD) has obtained a prominent position in the synthesis of nanoscale films with precise growth control. Apart from the well-established contribution of highly reactive neutral radicals towards film growth in PEALD, the ions generated by the plasma can also play a significant role. In this work, we report on the measurements of ion energy and flux characteristics on grounded and biased substrates during plasma exposure to investigate their role in tailoring material properties. Insights from such measurements are essential toward understanding how a given PEALD process at different operating conditions can be influenced by energetic ions. Ion flux-energy distribution functions (IFEDFs) of reactive plasmas typically used for PEALD (O2, H2, N2) were measured in a commercial 200 mm remote inductively coupled plasma ALD system equipped with RF substrate biasing. IFEDFs were obtained using a gridded retarding field energy analyzer and the effect of varying ICP power, pressure and bias conditions on the ion energy and flux characteristics of the three reactive plasmas were investigated. The properties of three material examples—TiOx, HfNx and SiNx—deposited using these plasmas were investigated on the basis of the energy and flux parameters derived from IFEDFs. Material properties were analyzed in terms of the total ion energy dose delivered to a growing film in every ALD cycle, which is a product of the mean ion energy, total ion flux and plasma exposure time. The properties responded differently to the ion energy dose depending on whether it was controlled with RF substrate biasing where ion energy was enhanced, or without any biasing where plasma exposure time was increased. This indicated that material properties were influenced by whether or not ion energies exceeded energy barriers related to physical atom displacement or activation of ion-induced chemical reactions during PEALD. Furthermore, once ion energies were enhanced beyond these threshold barriers with RF substrate biasing, material properties became a function of both the enhanced ion energy and the duration for which the ion energy was enhanced during plasma exposure. These results have led to a better insight into the relation between energetic ions and the ensuing material properties, e.g. by providing energy maps of material properties in terms of the ion energy dose during PEALD. It serves to demonstrate how the measurement and control of ion energy and flux characteristics during PEALD can provide a platform for synthesizing nanoscale films with the desired material properties.

Analysis of grid size and ion temperature effects in retarding field energy analyzers (RFEA)

The self-potential of a high current ion beam may be fairly balanced by a secondary plasma with plasma potential Vp; the retarding field energy analyzer (RFEA) measuring the secondary ion outflow is a promising diagnostic of these plasmas. A detailed analysis of a planar RFEA is here discussed, with a focus on the response (in stationary condition) of the detector to the secondary plasma characteristics, and on the determination of design rules for the parameters of a compact RFEA. First, energy distributions of the secondary ion plasma outflow are discussed, as a function of ion temperature Ti and electron temperature Te. Second, the modulation of grid potential (depending on grid pitch b and wire radius a) is calculated both for 2D and 3D models, reaching a good agreement with accompanying electrostatic simulations. Beam emittance (or temperature) growth and beam diffusion are then discussed, also when input ion energy matches the discrimination voltage Vd; corrections to the usual paraxial dynamics result are then introduced. As regards the response of the whole detector (also called transmission function) and the beam dynamics evolution, systematic 3D multiparticle simulations were performed in order to study the behavior of the detector as a function of Vd and of the secondary plasma parameters Vp, Ti and Te and to determine the design parameter effects on instrumental precision (found to be about 0.1 b |Ez| with Ez the axial field near grids).

Effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron sputtering

The effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron discharge was investigated. The ion velocity distribution function (IVDF), the maximum ion energy and ion flux density were measured at the substrate by a retarding field energy analyzer. The sputtering behavior was investigated by the electric characteristics of target and bias discharges using voltage–current probe technique. It was found that the substrate bias led to the decrease of sputtering power, voltage and current with the amplitude <7.5%. The substrate bias also led to the broadening of IVDFs and the increase of ion flux density, made the energy divergent of ions impacting the substrate. This effect was further enhanced by increasing bias power and reducing discharge pressure.

Ion property and electrical characteristics of 60 MHz very-high-frequency magnetron discharge at low pressure

The pre-ionized 60 MHz very-high-frequency (VHF) magnetron discharge at low pressure, assisted by inductively coupled plasma (ICP) discharge, was developed. The measurement of ion flux density and ion energy to the substrate was carried out by a retarding field energy analyzer. The electric characteristics of discharge were also investigated by voltage–current probe technique. It was found that by reducing the discharge pressure of VHF magnetron discharge from 5 to 1 Pa, the ion flux density increased about four times, meanwhile the ion energy also increased doubly. The electric characteristics of discharge also showed that a little improvement of sputtering effectiveness was achieved by reducing discharge pressure. Therefore, the deposition property of VHF (60 MHz) magnetron sputtering can be improved by reducing the discharge pressure using the ICP-assisted pre-ionized discharge.

Excitation of Ar, O2, and SF6/O2 plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron excitation mode

Using tailored voltage waveforms (TVWs) to excite a low pressure, low-temperature plasma discharge, we compare the behavior of three gas mixtures, namely Ar, O2 and SF6/O2 mixtures, the last of which is currently used for the plasma-texturing of silicon wafers for photovoltaics. The primary goal of using TVWs is to control the ion bombardment energy at the surface of the wafer, and this control is demonstrated through retarding field energy analyzer (RFEA) measurements. However, the complicated electrical response of the plasma to such waveforms makes the ab initio prediction of the ion energy difficult, although by using said RFEA measurements, we show that it can be done approximately by using measured electrical data. In addition, we utilize the response of the plasma to mirror-image ‘sawtooth’ waveforms as a predictor of the dominant electron heating mode (α or drift-ambipolar, DA). At equivalent pressures and coupled powers, the Ar and O2 mixtures always display behavior associated with electropositive plasmas (a solely α heating mode). However, with the addition of SF6 to an O2 gas flow, a transition can be observed towards a behavior associated with a more electronegative plasma (i.e. a dominant DA heating mode). This crossover in the dominant heating mode is observed through the relative self-bias voltage for each type of sawtooth waveform, and is therefore a useful predictor of the dominant electron heating mode in low pressure, cold plasma discharges.

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

Retarding field energy analyzers (RFEAs) are used routinely for the measurement of ion energy distribution functions. By contrast, their ability to measure ion flux densities has been considered unreliable because of lack of knowledge about the effective transmission of the RFEA grids. In this work, we simulate the ion trajectories through a three-gridded RFEA using the simulation software SIMION. Using idealized test cases, it is shown that at high ion energy (i.e., >100 eV) the transmission is equal to the optical transmission rather than the product of the individual grid transparencies. Below 20 eV, ion trajectories are strongly influenced by the electric fields in between the grids. In this region, grid alignment and ion focusing effects contribute to fluctuations in transmission with ion energy. Subsequently the model has been used to simulate the transmission and energy resolution of an experimental RFEA probe. Grid misalignments reduce the transmission fluctuations at low energy. The model predicts the minimum energy resolution, which has been confirmed experimentally by irradiating the probe with a beam of ions with a small energy bandwidth.

Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas**Project supported by the Important National Science and Technology Specific Project, China (Grant No. 2011ZX02403-001), the National Natural Science Foundation of China (Grand No. 11675039), and the Fundamental Research Funds for the Central Universities, China (Grand No. DUT16LK06).

A retarding field energy analyzer (RFEA) is used to measure the time-averaged ion energy distributions (IEDs) on the substrate in both continuous wave (CW) and synchronous pulse modulated radio-frequency (RF) inductively coupled Ar plasmas (ICPs). The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions. It is found that as θ increases from 0 to π, the IED moves towards the low-energy side, and its energy width becomes narrower. In order to figure out the physical mechanism, the voltage waveforms on the substrate are also measured. The results show that as θ increases from 0 to π, the amplitude of the voltage waveform decreases and, meanwhile, the average sheath potential decreases as well. Specifically, the potential drop in the sheath on the substrate exhibits a maximum value at the same phase (i.e., θ = 0) and a minimum value at the opposite phase (i.e., θ = π). Therefore, when ions traverse across the sheath region above the substrate, they obtain less energies at lower sheath potential drop, leading to lower ion energy. Besides, as θ increases from π to 2π, the IEDs and their energy widths change reversely.

In situ electrostatic characterisation of ion beams in the region of ion acceleration

In situ and ex situ techniques have been used to measure directional ion beams created by a sharp axial potential drop in low pressure expanding plasmas. Although Retarding Field Energy Analysers (RFEAs) are the most convenient technique to measure the ion velocities and plasma potentials along with the plasma density, they are bulky and are contained in a grounded shield that may perturb the electric potential profile of the expanding plasma. In principle, ex situ techniques produce a more reliable measurement and Laser Induced Fluorescence spectroscopy (LIF) has previously been used to characterise the spatial velocity profile of ion beams in the same region of acceleration for a range of pressures. Here, satisfactory agreement between the ion velocity profiles measured by LIF and RFEA techniques has allowed the RFEA method to be confidently used to probe the ion beam characteristics in the regions of high gradients in plasma density and DC electric fields which have previously proven difficult.

Multiprobe characterization of plasma flows for space propulsion

Plasma engines for space propulsion generate plasma jets (also denominated plasma plumes) having supersonic ion groups with typical speeds in the order of tens of kilometers per second, which lies between electron and ion thermal speeds. Studies of the stationary plasma expansion process using a four-grid retarding field energy analyzer (RFEA), an emissive probe (EP) and a Langmuir probe (LP), all mounted on a three dimensionally (3D) displaced multiprobe structure are discussed. Specifically, the determination of plasma beam properties from the RFEA current-voltage (IV) characteristic curves is presented. The experimental results show the ion energy spectra to be essentially unchanged over 300 mm along the plasma-jet expansion axis of symmetry. The measured ion velocity distribution function (IVDF) results from the superposition of different ion groups and has two dominant populations: A low-energy group constituted of ions from the background plasma is produced by the interaction of the plasma jet with the walls of the vacuum chamber. The fast-ion population is composed of ions from the plasma beam moving at supersonic speeds with respect to the low-energy ions. The decreasing spatial profiles of the plasma-jet current density are compared with those of the low-energy ion group, which are not uniform along the axis of symmetry because of the small contributions from other ion populations with intermediate speeds.

Supersonic plasma beams with controlled speed generated by the alternative low power hybrid ion engine (ALPHIE) for space propulsion

The characteristics of supersonic ion beams from the alternative low power hybrid ion engine (ALPHIE) are discussed. This simple concept of a DC powered plasma accelerator that only needs one electron source for both neutral gas ionization and ion beam neutralization is also examined. The plasma production and space charge neutralization processes are thus coupled in this plasma thruster that has a total DC power consumption of below 450 W, and uses xenon or argon gas as a propellant. The operation parameters of the plasma engine are studied in the laboratory in connection with the ion energy distribution function obtained with a retarding-field energy analyzer. The ALPHIE plasma beam expansion produces a mesothermal plasma flow with two-peaked ion energy distribution functions composed of low and high speed ion groups. The characteristic drift velocities of the fast ion groups, in the range 36.6–43.5 Km/s, are controlled by the acceleration voltage. These supersonic speeds are higher than the typical ion sound velocities of the low energy ion group produced by the expansion of the plasma jet. The temperatures of the slow ion population lead to ion Debye lengths longer than the electron Debye lengths. Furthermore, the electron impact ionization can coexist with collisional ionization by fast ions downstream the grids. Finally, the performance characteristics and comparisons with other plasma accelerator schemes are also discussed.

IEDF distortion and resolution considerations for RFEA operation at high voltages

Retarding field energy analyzers (RFEA) have been used extensively to measure the ion flux energy distribution function of plasmas. For consistency, the ion flux energy distribution function is referred to as the ion energy distribution function (IEDf) even though it more accurately represents the one-dimensional ion velocity distribution function. In the past, these devices have operated at voltages less than 1 kV. Higher operating voltages (>2 kV) are currently desired. For an RFEA to operate at these voltages, design changes are necessary that impact the energy resolution and cause space charge build-up. To investigate the effect the design changes have for a high voltage RFEA, electromagnetic simulations and particle-in-cell (PIC) simulations were used to analyze the electric field between the grids, the potential drop in the grid holes, and space charge build-up between the grids. Non-unique optimized dimensions for the RFEA increased the electric field uniformity. The optimization minimizes the electric field from distorting the IV curve or adversely affecting the energy resolution. It was found that a larger grid gap distance and smaller grid hole diameter decreases the potential drop in the grid holes improving energy resolution. IV curves from the PIC simulation were used to obtain space charge distorted IEDfs. The point at which space charge distorts the IV curve is dependent on the grid gap distance and incoming flux. Space charge build-up was found to only affect low energy ions which manifested by cutting off the low energy portion of the IEDf. To fix space charge distortions, the flux into the probe can be limited or it may be possible to account for the distortion when calculating the IEDf.