Developing environmentally friendly methods for reducing graphene oxide (GO) is essential. This study investigates the surface modification and reduction of GO films using 200 eV argon ion (Ar+) beam irradiation. X-ray Photoelectron Spectroscopy (XPS) analysis reveals significant chemical changes on the GO surface. GO was irradiated with a 200 eV Ar+beam for varying times (0 to 80 sec). XPS survey spectra showed the presence of carbon and oxygen, with an increasing carbon atomic percentage over time. High-resolution XPS spectra of C 1s revealed peaks corresponding to sp2, C-OH, O-C-O, C=O, and O-C=O bonds. In the O 1s spectra, C=O, O-C-O, and C-OH groups were observed. Upon irradiation, the C=O peak consistently decreased, the O-C-O peak fluctuated, and the C-OH peak increased, indicating effective reduction of C=O groups, dynamic changes in O-C-O functionalities, and the formation of additional C-OH groups. The C/O ratio increased from ∼ 2.4 to 2.7, underscoring the reduction process and enhanced carbon content. This method proves to be an efficient approach for producing reduced graphene oxide (rGO) with improved properties for advanced applications.