Development of optical chemical sensors for the detection of specific toxic chemicals at ultratrace levels and analysis of complex mixtures is crucial for new green and safe technologies [1, 2]. Metallic structures confined at the nanoscale acquire interesting properties such as strongly localizing E fields on their surfaces through Plasmonic Resonance under stimuli of light at certain wavelengths. This nanostructures are called plasmonic structures [3–5]. This effect is exploited to amplify the optical signal obtained by the molecules of interest, located near plasmonic structures [3, 6]. Purpose of the work is the development of innovative, easy to manufacture and cheap optical active layer consisting of Plasmonic Ag Nanoparticles on a Wide Band Gap semiconductor material such as Silicon Carbide to be used as substrate for Surface Enhanced Raman Scattering or for the fabrication of integrated optical sensor for remote chemical and biological applications. In this contest, the phenomenon of Ag thin film thermal dewetting on SiC substrate was implemented to develop a simple nanoparticles synthetic approach. Scanning Electron Microscopy confirmed the formation of Ag nanoparticles by thermal annealing of thin silver film. 4-MBA was used as probe molecule for SERS phenomenon investigation. The formation of a covalent bond between the silver nanostructures, acting as plasmonic "hot spots", and the species of interest enable its detection at very low concentrations, in the range of 10-5 M or less, in both Raman and UV-Vis configurations.
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