Metamaterial analogues of electromagnetically induced transparency (EIT) enable a unique avenue to endow a coupled resonator system with quantum interference behavior, exhibiting remarkable properties in slow-wave and highly sensitive sensing. In particular, tunable and ultracompact-chip-integrated EIT-like effects reveal fantastic application prospects in plasmonic circuits and networks. Here, we demonstrate an electrically tuned on-chip EIT analogue by means of dynamic EIT modules side-coupled to ultrathin corrugated metallic strips supporting spoof surface plasmon polaritons (SSPPs). By embedding PIN diodes into the subradiant mode, on-to-off control of the destructive coupling between the radiative and subradiant modes results in dynamic chip-scale EIT-like behavior under the change of the bias voltage, allowing for an electrically tunable group delay of the surface waves. The physical mechanism of the active modulation is elucidated with the coupled mode theory. In addition, the cascaded capacity performed by installing multiple EIT modules with an interval of equivalent wavelength are also characterized on a planar plasmonic waveguide. The proposed system will pave a versatile route toward dynamic control in chip-scale functional devices.
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