PVD Method Research Articles

Creation of magnetic thin film integrated optical non-reciprocal element using supersonic free jet PVD method

Professor Hideki Yokoi, Department of Electronic Engineering, Shibaura Institute of Technology, Japan, is focused on developing a magneto-optical waveguide with a semiconductor waveguide layer. He and his team are using wafer bonding technology and a new film forming method called the supersonic free jet PVD method to create an optical waveguide with an arbitrary layer structure. The research of Yokoi and the team is paving the way for the possibility to easily manufacture an optical waveguide of any layer structure, which will lead to the development of magneto-optical waveguides for optical nonreciprocal elements, optical integrated circuits that will integrate the optical elements with various functions, and optoelectronic integrated circuits. In addition, by replacing electrical wiring with optical wiring, there will be a suppression of heat loss and reduction of power consumption, reaping environmental benefits. Yokoi and the team are working alongside the International Research Centre for Green Electronics (IRCGE), which aims to contribute to green innovation. Ultimately, Yokoi hopes his findings will have benefits that will expand beyond the field of optical communications, including a positive environmental impact through reduced power consumption.

Production of multi-layer coatings based on ZrN AND TiN with high physical and mechanical properties

Changes in the phase composition, microstructure, and physical and mechanical properties of ZrN and TiN coatings formed by the PVD method under the influence of bias voltage are considered. The optimal values of the bias voltage in the process of deposition of one-component coatings ZrN and TiN, at which the best complex of physical and mechanical properties is formed, have been established. The design of a multilayer coating based on alternating layers of TiN—ZrN—TiN for abrasive wear conditions with a complex of high performance properties has been developed.

Effect of Sterilization (Autoclave) on Wear of Tungsten-Carbide Burs Coated With Diamond Particles With Different Thicknesses

Background: Extending the lifespan and improving the physical properties of dental burs as the most extensivly used instruments have been the subject of several studies. One of the proposed methods is using surface coatings for the burs. Since the dental instruments are reused, they require sterilization. One of the possible causes of the damage to dental burs is autoclaving process. This study aimed to investigate sterilization (autoclave) effect on wear of diamond coated tungsten-carbide burs with different thicknesses. Methods: In this in vitro study, 40 tungsten-carbide dental burs (IQ DENT, Poznan, Poland) were selected, out of which 20 burs were coated with 1.5-μm-like diamond particles, and 20 burs were coated with 3.5-μm by PVD method using Swin Plasma Coating Machine. Then, the burs were randomly divided into four groups (n=10) as follow: G1: 1.5 μm thickness coated burs without sterilization; G2: 3.5 μm thickness coated burs without sterilization; G3: 1.5 μm coated with sterilization; and G4: 3.5μm thickness coated burs with sterilization. Their weights were measured before wear test.Wear test was performed and then they were re-weighted. Data were analyzed using SPSS software (version 21) as well as Two-way ANOVA and Tukey HSD supplementary tests (α=0.05). Results: Mean and standard deviation of the burs weights without sterilization in the control groups were 7.31±2.63 and 7.96±1.61 mg, respectively; and mean and standard deviation of the burs weights in the sterilization groups were 7.06±0.98 and 7.12±1.11 mg, respectively. The study results showed that "sterilization application" and "thickness of coated layer" were the main factors and their intraction had no statistically significant difference (P=0.589). Conclusions: The sterilization process had no effect on wear of diamond coated tungsten-carbide burs with different thicknesses.

Development of Effectual Substrates for SERS by Nanostructures-on flexible surfaces

The current study examines recent advancements in surface-enhanced Raman scattering (SERS), a technique that employs flexible surfaces as an active substrate, this surfaces consist from two-dimensional thermo-plasmonic grating. With 53 nm Au layer (was deposited on the 2D grating structure of the PDMS by the PVD method). The explosive wire technique was used to preparing Ag nanoparticles that were used for the purpose of SERS. The effect of the plasmonic nanostructures on the absorption spectra and Surface - Enhanced Raman Scattering (SERS) activities was examined. Rhodamine 6G dye was used as a probe molecule. X-Ray diffraction (XRD) was used to examine the structural characteristics of the nanoparticles. The morphology was assessed using Field Emission Scanning Electron Microscopy(FESEM). A twin beam UV-Vis Spectrophotometer was used to measure the absorption of the combined Rh6G dye (concentration 1×10“–6M) with the nanostructures. a Sunshine Raman microscope system and a 50mm objective lens, used for investigating the Raman spectra of the Rh6G combined with nanostructures. The results showed that the enhancement factor (EF) for SERS of R6G (1×M) reached to (2.2×10 3) When using Ag nanoparticles and (0.08 × 103) when R6G deposited directly on the flexible substrates without nanostructures at the wave number (1650 cm−1), we produced a recyclable, homogeneous, and highly sensitive SERS substrate with dependable reproducibility. For the SERS substrate, a surface made up of two-dimensional (2D) flexible grating substrates was chosen to provide multiple modalities in electrical and medicinal applications.

Evaluation of Physicochemical and Electrochemical Properties of Surface Modified Pure Titanium Grade II

The paper contains the results of surface modification on the properties of the pure titanium Grade II, obtained by the SLM procedure. In the paper, the analysis of the results of physicochemical properties, such as pitting corrosion test and contact angle measurements and Surface Free Energy calculated were performed. Additionally, the microscopic observation with microchemical analysis, surface topography analysis using Atomic Force Microscopy, surface roughness measurements and wear test were performed too. The studies were carried out on three groups of samples in an initial state (1) (after mechanical treatment - mechanical grinding and polishing) and after surface modification by PVD method using CrN layer (2) and TiN layer (3). Based on the obtained results it can be concluded that the samples with TiN layer were characterized by the optimum properties.

Two-stage PVD method for protective coating formation

The CVD methods are typically used for the formation of aluminum oxide coatings since aluminum oxide is a dielectric. The adhesion between the protective coating and the substrate material is normally improved by growing thin intermediate layers based on titanium oxides and nitrides. These intermediate layers are mainly formed using the PVD methods. In this paper, we propose a two-stage PVD method for forming a layered structure on the titanium substrate. The formation of intermediate layers was carried out by the magnetron method (first stage), and the main protective layer was deposited at the second stage using a fore-vacuum electron source. The dense beam plasma generated during the electron beam transport in a fore-vacuum gas medium compensates for the negative electrical charge accumulating on the surface of the aluminum oxide target and facilitates its effective evaporation. The electrical properties of the intermediate layers and the resulting layered coatings have been investigated, including the tangent of dielectric loss angle, the real and imaginary parts of the conductivity and the dielectric constant dependencies on frequency.

Improving the Properties of Composite Titanium Nitride Layers on the AZ91D Magnesium Alloy Using Hydrothermal Treatment.

Coating magnesium alloys with nitride surface layers is a prospective way of improving their intrinsically poor surface properties; in particular, their tribological and corrosion resistance. These layers are usually produced using PVD methods using magnetron sputtering or arc evaporation. Even though the thus-produced layers significantly increase the wear resistance of the alloys, their effects on corrosion resistance are unsatisfactory because of the poor tightness, characteristic of PVD-produced products. Tightness acquires crucial significance when the substrate is a highly-active magnesium alloy, hence our idea to tighten the layers by subjecting them to a post-deposition chemical-hydrothermal-type treatment. This paper presents the results of our experiments with a new hybrid surface engineering method, using a final tightening pressure hydrothermal gas treatment in overheated steam of the composite titanium nitride layers PVD, produced on AZ91D magnesium alloy. The proposed method resulted in an outstanding improvement of the performance properties, in particular resistance to corrosion and wear, yielding values that exceed those exhibited by commercially anodized alloys and austenitic stainless 316L steel. The developed hybrid method produces new, high-performance corrosion and wear resistant, lightweight magnesium base materials, suitable for heavy duty applications.

Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating

Hybrid high power impulse/direct current magnetron sputtering (HiPIMS/DCMS) film growth technique with metal-ion-synchronized substrate bias allows for significant energy savings as compared to conventional PVD methods. For carefully selected type of metal ion irradiation, taking into account ion mass, ionization potential, and reactivity towards working gas, fully dense and hard films can be obtained with no intentional substrate heating. The thermally-driven adatom mobility, which is an essential densification mechanism in conventional film growth that takes place at elevated temperatures, is replaced with that supplied by effective low-energy recoil creation. In this contribution we explore effects of the high-mass W+ irradiation, which has proven to be the most efficient in densifying Ti0.50Al0.50N layers, serving here as a model system, grown with no substrate heating. We study the effects of two essential parameters: W+ energy EW+ and W concentration x, on film porosity, phase content, nanostructure, and mechanical properties. EW+ varies from ~90 to ~630 eV (controlled by substrate bias voltage amplitude Vs) and x from 0.02 to 0.12 (controlled by the HiPIMS pulse length), while the HiPIMS peak target current is kept constant. Results reveal that a strong coupling exists between the W+ incident energy and the minimum W concentration required to grow dense layers.

Thermal expansion coefficients of Ag, Cu and diamond nanoparticles: In situ TEM diffraction and EELS measurements

Thermal properties of nanomaterials remain unknown in many aspects. In this work, we present the results of in situ electron microscopy investigation of thermal expansion of Ag, Cu and diamond nanoparticles in a range of sizes 5–70 nm. Metal nanoparticles were formed in a vacuum by PVD method on an amorphous carbon substrate, while the diamond ones were commercial detonation nanodiamond (DND) aqueous suspension. The thermal expansion was determined using electron diffraction and valence EELS spectroscopy techniques in the 20–500 °C (Ag, Cu) and 20–800 °C (diamond) temperature range. It was shown that the thermal expansion coefficient of metal and diamond nanoparticles is positive, and it gradually increases with the nanoparticle size decreasing. Thus, the linear thermal expansion coefficient of 5-nm-size diamond, Ag, and Cu nanoparticles reaches the value ≈1.1, 3, and 3.5 × 10−5 K−1, respectively, which is 80–300% higher than that of the bulk. The observed effect is discussed within the framework of the molecular kinetic theory.

Investigations of TiO₂, Ti/TiO₂, and Ti/TiO₂/Ti/TiO₂ coatings produced by ALD and PVD methods on Mg-(Li)-Al-RE alloys substrates

Investigations of TiO₂, Ti/TiO₂, and Ti/TiO₂/Ti/TiO₂ coatings produced by ALD and PVD methods on Mg-(Li)-Al-RE alloys substrates

Вплив зносу інструменту на шорсткість поверхні при токарному обробленні

У даній роботі була досліджена токарна обробка з точки зору якості поверхні заготовки і зносу різальних інструментів. Дослідження показує взаємозв'язок між вихідними і вхідними параметрами, такими як подача, радіус при вершині пластини і метод нанесення покриття. Обрані методи нанесення покриття – це методи MT-CVD і PVD і, крім цього, розглядалась роль різних матеріалів покриття – багатошарову покриття TiCN / Al2O3 / TiN і одношарове TiAlN на карбідній основі.
 In this work, turning in terms of surface quality of the workpiece and wear of cutting tools was investigated. The study shows the relationship between output and input parameters, such as feed, radius at the top of the plate and the method of coating. The selected coating methods are MT-CVD and PVD methods and, in addition, the role of different coating materials was considered - multilayer coating TiCN / Al2O3 / TiN and single-layer TiAlN based on carbide.

Influence of laser texturing on tribological properties of DLC coatings

Abstract The work presents the use of laser texturing of DLC coatings to improve tribological properties. The coatings were applied by the PVD method to the rings made of 4H13 steel. The surface texturing was performed with the TruMICRO 5325c picosecond laser with the radiation wavelength λ = 343 nm. The surface microstructure analysis, surface microgeometry and microhardness measurements and tribological tests were carried out. The problem presented in the paper can be used to extend the knowledge of the areas of application of DLC coatings, especially in sliding friction pairs.

Adhesion of AlCrN coating deposited on TiB2/Ti composites sintered by SPS dedicated for high temperature tribological applications

The aim of the work was to investigate the adhesion of AlCrN coating deposited by PVD method on TiB2/Ti composites manufactured by Spark Plasma Sintering (SPS). The composites were produced from three kinds of mixtures of powders: (1) Ti and TiB2, (2) Ti6Al4V and TiB2 and (3) Ti and B. Each of the mixtures was prepared at 50/50 wt. % ratio of components. Before the coating deposition the specimens were polished to obtain the surface roughness typically required for machine parts. For each set of specimens an individual surface preparation procedure was developed. The coating adhesion was measured using a scratch tester. The process of scratching was carried out to observe the characteristic moments of adhesive and cohesive failures. The highest critical loads were obtained for the coating deposited on composites produced from the mixture of two powders containing pure Ti and TiB2.

PERBANDINGAN METODE PRELOADING DENGAN VAKUM KONSOLIDASI TANAH PADA PEMODELAN DI LABORATORIUM

ABSTRACT This study aims to determine the parameter comparison of the magnitude of the primary reduction and consolidation time in the preloading method using PVD and vacuum method using PVD with modeling in the laboratory. The benefit of this research is that it can provide a comparison of the preloading method and the vacuum method in terms of accelerating the consolidation time as well as contributing to science in the field of soil improvement. Primary consolidation theory is used in this research. Quantitative descriptive research method with testing data collection techniques by means of modeling in the laboratory. The modeling of the vacuum method used a test tub measuring (1.2 × 0.6 × 0.9) m, the vacuum pump suction capacity of 5 Pa, the air hose as PHD and geomembrane cloth as PVD material. The preloading method with PVD uses a test tub measuring (0.8 × 0.6 × 0.9) m, preloading load in the form of bangka sand (ɣ = 1.532 t / m³) with a thickness of 10 cm and a geomembrane cloth as PVD material. In each test basin filled with soil and water with a soil volume weight of 1.3 t / m³, a ground surface height of 0.5 m and a groundwater level of 0.42 m. The results showed that with the same amount of reduction, namely 7.26 mm preloading method using PVD took 81 hours while in the vacuum method the time needed was 41 hours. Thus it can be concluded that the reduction in the vacuum method is faster than the preloading method with PVD. Keywords: Primer settelment, PVD, Vacum, consolidation time

Effect of Titanium Nitride, Diamond-Like Carbon and Chromium Carbonitride Coatings on the Life Time of an AISI M2 Steel Punch Forming Tool

In this study, failure analysis of a punch forming tool was studied and three types of coatings were applied to study their effect on the failure of the tool. The coatings were DLC, TiN and CrCN. The PECVD, PVD and TRD methods were used as coating methods. The experimental tests indicate that although there was no evidence of failure of the coated specimens, there were some microscopic defects in coatings which had some negative effects on surface quality of products. All punch forming tools were studied via FE-SEM microscope with EDS analysis. From an industrial perspective, the capital return rate of TiN coating was very high. Both DLC and chromium carbonitirde coated specimens had the same negative relative difference which means their results were worse than the uncoated specimens. The life times for the DLC, CrCN and TiN-coated specimens were respectively 1.5, 2.3 and 8 times more than that of the uncoated specimen. The roughness of specimens after 100,000 cycles were 21.021 ± 0.001, 2.024 ± 0.001, 4.031 ± 0.001 and 1.213 ± 0.001 µm for uncoated, DLC, CrCN and TiN-coated specimens, respectively. High surface hardness of the TiN coating delayed the deformation in punch forming tools and the formation of surface defects and prolonged the life time of the tool.

Effect of titanium coated with 3 different types of copper nanoparticles in the oral biofilm formation

The antimicrobial activity of copper nanoparticles (CuNps) has been studied against different pathogenic microorganisms, however to our knowledge, no studies have been reported about their activity against periodontal bacteria in a biofilm. Therefore, in order to bridge this information gap, this study aims to observe and count the formation of oral biofilm on titanium alloys coated with different types of CuNps. Three different methods were used to synthetize and then apply a coating of CuNps on dental implant healing caps, by then, their antibacterial properties were investigated using an in vitro oral biofilm by plate count method and confocal laser microscopy. The result of the counts, showed that the lower microbial load is observed in the caps coated with CuNps obtained by copper electroplating, it can be concluded, within the limitations of this study, that CuNps obtained by copper electroplating showed greater bactericidal effect that PVD methods, especially in periodontal pathogenic bacteria like P.gingivalis, and P. intermedia. More studies are necessary for corroborate this observation and better understand the reason why only CuNps obtained by certain methods were more bactericidal tan others and the reason why only some bacteria were affected. The antimicrobial properties exhibited by CuNps could be useful for develop anti-infective biomaterials become a strategy to control dental biofilm.

Physical Structure Analysis and Optical Properties of Sudan III Thin Film

Background: Sudan III is known red disazo dye possess a hydroxyl group which is sensitively to interact with others molecules such as CO2, O2, SO2 through hydrogen bonding. Methods: Fabrication of Sudan III thin film for sensor technology application has been carried out by using PVD method. The physical structure that is crystallinity of this film has been investigated by using XRD method. Results: The XRD spectra of powder Sudan III shows crystalline structure while the XRD spectra of thin film results of the PVD method, which is deposited on substrate glass slide shows amorphous structure. There are no differences in the crystallinity content of Sudan III thin film that exposure to acetone and alcohol vapor. The interplanar distance of crystals plane is about 28.47 nm, the average crystallite size is about 35.6 nm and the average molecular chain separation is about 37.9 nm. Sudan III thin film result of the PVD method shows an interesting optical characteristic (absorption). There are significantly different between UV-VIS spectra Sudan III thin film compared to the UV-VIS spectra of Sudan III solution. The UV-VIS spectra of the Sudan III thin film shows a decreasing of peak intensity in visible wavelength which indication of orientation effect of molecule on substrate surface. The aborption peak at UV region for Sudan III thin film shows a shifting to the long wavelength compared to the Sudan III in form of solution.

Experimental investigation of surface roughness and cutting force during machining of SS43100 by using coated and uncoated carbide inserts

Machining processes are the accurate metal removal processes for shaping components in the manufacturing industry. The main challenges of the manufacturing industry are to increase productivity and quality. Manufacturing industries are trying to reduce the cost of machined parts which are manufactured by different machined methods. Machining hard metals is a challenging task. In the presented research work machining parameters were investigated for machining of SS43100 by using coated and uncoated carbide tool inserts. Carbide tool inserts were coated by Ti16Zr using the PVD method of coating. Experiments were performed during the turning operation of SS43100 by coated and uncoated tool inserts. Cutting speed range were 150r.p.m, 250 r.p.m., 350 r.p.m., feed were 0.085 mm/rev, 0.095 mm/rev, 0.1 mm/rev. and depth of cut was 0.1 mm, 0.15 mm, and 0.2 mm selected as controlling factors. Surface roughness and cutting force were selected as response factors. Digital lathe tool dynamometer was used for cutting force measurement and ITI surface tester RS232 was used for surface roughness measurement. In the experimental study and analysis of output response parameters, Taghuchi L9 orthogonal array model has used The results obtained were optimized using the Taghuchi technique for cutting forces and surface roughness. The Taghuchi technique was performed for combinations of each input variable in linear fit model multivariate analytics. Experimental results were compared and models established supported by evidence.

HfN Coating of ASSAB 17 Steel by PVD Method and its Effects on 6063-T5 Aluminum Alloy Turning

The industrial tool performance inspires the study of the machining of several materials with low production downtime. Aluminum is well-known for its high strength-to-weight ratio when compare both plastic and raft, thus making it advantageous for aerospace, construction and transport applications. However, aluminum machining damages the cutting tool with diverse wear mechanisms (adhesion, abrasion), thus suggesting a need for a new coating material. Previous studies show a high performance in abrasion resistance of Hafnium nitride [HfN] coated tools in turning of AISI1020 steel. This article evaluates the performance of [HfN] coated and uncoated burins (ASSAB 17) through roughing of Aluminum profiles by temperature sensing at the tool/material interface, workpiece roughness measurement and inspection of the cutting tool wear. Scanning electron microscopy and confocal microscopy were used to identify tool wear. A digital temperature sensing device displaying infrared long-wavelength was designed to examine the temperature due to its correlation on the tool wear. A significant improvement during aluminum roughing was observed with the use of [HfN] coatings, due to increase of the wear resistance of the ASSAB 17 burin, thus improving the surface finish.

Impact of substrate temperature of yttrium doped NiAl bond coat fabricated by using EBPVD on inconel 625

The bond coat has been developed on Inconel 625 substrate by using Electron Beam Physical Vapour deposition (EBPVD) method at different substrate temperatures (ie. 873 K and 973 K). Intended for this persistence, the composition of Ni-49.8Al-0.2Y bond coat pellet was prepared. Structural information, Roughness, Morphology of coating have been characterized by using X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), and Field Emission Scanning Electron Microscopy (FESEM) respectively. Finally, the Coefficient of Thermal Expansion (CTE) is measured by using Dilatometer. Observed that the crystallinity was increased from 29.43 nm to 37.33 nm with increasing the substrate temperature. Also verified peak expansion is decreasing due to increase in substrate temperature. The average roughness increases to 17%. Columnar structure is observed at higher substrate temperature (973 K) of bond coat surface. The CTE of 973 K substrate temperature coating has 1.27 × 10 −5 K −1 at 1000 °C which is increases 8% with the substrate (1.16 × 10 −5 K −1 at 1000 °C). This is accomplished due to addition of Yttrium to bond coat material. These coatings used in thermal barrier applications such as in gas turbines, jet engines, and power aircraft etc. • Yttrium doped NiAl bond coat is deposited by EB PVD method on Inconel 625 substrate with different substrate temperatures. • Phase analysis, Average surface roughness and Surface morphology is measured by XRD, AFM and FESEM. • The thermal expansion coefficient is increased to 8% higher than the Inconel 625 substrate to bond coating (973 K).