In this paper, surface-enhanced Raman scattering (SERS) substrates with high detection sensitivity were prepared by thermal oxidation, and magnetron sputtering and the SERS properties of these substrates were studied using methylene blue as probe molecule. The result showed that the SERS substrate has good enhancement effect (analytical enhancement factor ~ 107), stability, and reproducibility. The minimum detection limit for methylene blue can reach 10–9 M. The SERS intensity and the concentration has a linear dependence (R2 > 0.9). This suggests that the substrate has great potential in the detection of biological and chemical substances.
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