Ion implantation is commonly utilized during the fabrication of lithium niobate (LiNbO3) acousto- and opto-electronic devices. Mechanistically, implantation creates material defects affecting properties that can be leveraged to create functionality. Enhancing scalability and the repeatability of these implantation protocols therefore necessitates linking process parameters of implantation with those defects created and ultimately the properties imparted by these defects. In response, we systematically examined the effects of ion species (H, He, and N), irradiation energy (150 keV to 2 MeV), implantation fluence (1 × 1012 to 1 × 1018 ions/cm2), and post-irradiation heat treatment (250 to 750 °C) in 128° Y-cut LiNbO3. The resulting defect structures were then analyzed via transmission electron microscopy and Raman spectroscopy. Defect formation suitable for fracture-based processes can be achieved with implantation of He ions, using an implantation fluence of 1 × 1018 ions/cm2 and a heat treatment at 250 or 500 °C. Other irradiation and annealing recipes that mimic material fabrication conditions show the defect evolution in LiNbO3 dependent on irradiation conditions.
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