Phonon-mediated Kinetic Inductance Detectors Research Articles

CALDER: The Second-Generation Light Detectors

The main aim of the cryogenic wide-area light detectors with excellent resolution project is the development of cryogenic light detectors with large active area (~50 mm × 50 mm) and noise energy resolution smaller than 20-eV RMS. Such detectors will be used to discriminate the background in next generation large-mass bolometric experiments, such as cryogenic underground observatory for rare events. In this paper, we present the fabrication process of the phonon-mediated kinetic inductance detectors (KIDs). In the first part of the project, Al KIDs have been developed. Thin film Al (40 nm) were evaporated on high quality, high resistivity (>10 kΩ·cm) Si(1 0 0) wafers using a high vacuum electron beam evaporator. Detectors were patterned by direct-write Electron Beam Lithography (EBL) using positive tone resist AR-P 669.06. To improve the energy resolution of our detector, superconductors with higher kinetic inductance, such as the substoichiometric titanium nitride (TiNx), were developed. TiNx is deposited with reactive dc magnetron sputtering. Thus, the fabrication process is subtractive and consists of EBL patterning through negative tone resist AR-N 7700 and SF6 etch using a Deep Reactive Ion Etching - Inductively Coupled Plasma. Critical temperature of TiNx samples was measured using the 4-point probe geometry.

Design and Fabrication of the Second-Generation KID-Based Light Detectors of CALDER

The goal of the cryogenic wide-area light detectors with excellent resolution project is the development of light detectors with large active area and noise energy resolution smaller than 20 eV RMS using phonon-mediated kinetic inductance detectors (KIDs). The detectors are developed to improve the background suppression in large-mass bolometric experiments such as CUORE, via the double readout of the light and the heat released by particles interacting in the bolometers. In this work we present the fabrication process, starting from the silicon wafer arriving to the single chip. In the first part of the project, we designed and fabricated KID detectors using aluminum. Detectors are designed by means of state-of-the-art software for electromagnetic analysis (SONNET). The Al thin films (40 nm) are evaporated on high-quality, high-resistivity (> 10 kΩ cm) Si(100) substrates using an electron beam evaporator in a HV chamber. Detectors are patterned in direct-write mode, using electron beam lithography (EBL), positive tone resist poly-methyl methacrylate and lift-off process. Finally, the chip is diced into 20 × 20 mm2 chips and assembled in a holder OFHC (oxygen-free high conductivity) copper using PTFE support. To increase the energy resolution of our detectors, we are changing the superconductor to sub-stoichiometric TiN (TiNx) deposited by means of DC magnetron sputtering. We are optimizing its deposition by means of DC magnetron reactive sputtering. For this kind of material, the fabrication process is subtractive and consists of EBL patterning through negative tone resist AR-N 7700 and deep reactive ion etching. Critical temperature of TiNx samples was measured in a dedicated cryostat.

Phonon-Mediated KIDs as Light Detectors for Rare Event Search: The CALDER Project

Background suppression plays a crucial role in particle physics experiments searching for rare events, such as neutrinoless double beta decay and dark matter interactions. Bolometers, that are among the most competitive devices in this field, would largely benefit from the development of ultrasensitive light detectors, as the combined readout of the bolometric and light signals enables the particle identification. The CALDER collaboration is developing superconducting light detectors that will match the requirements of next generation experiments: noise lower than 20 eV, large active area (>20 cm 2 ), wide temperature range of operation, high radiopurity, and ease in fabricating hundreds of channels. For this purpose, we are exploiting the excellent energy resolution and the natural multiplexed readout provided by kinetic inductance detectors (KIDs). KIDs have already demonstrated their potentiality as direct detectors of photons for different astrophysical applications. The aim of our project is to apply this technology in particle physics, using indirect detection. These devices can be operated in a phonon-mediated approach, in which KIDs are coupled to a large insulating substrates in order to increase the active surface from a few mm2 to 25 cm 2 . We have already demonstrated the feasibility of a phonon-mediated KIDs-based light detectors, using aluminium sensors. These device reached a baseline sensitivity of around 80 eV with an overall efficiency of about 20%. Currently, we are testing new materials (e.g., Ti-Al and nonstoichiometric TiN) to enhance the sensitivity and reach the goal of our project. We present our results and the physical interpretation of the device behavior. Finally, we also discuss the impact of this project on the most advanced bolometric experiments searching for neutrinoless double beta decay and dark matter.

Phonon-Mediated KIDs as Light Detectors for Rare-Event Search: The CALDER Project

Background suppression plays a crucial role in experiments searching for rare events, like neutrino-less double beta decay (0 $$\nu $$ DBD) and dark matter. Large mass bolometers that are among the most competitive devices in this field would largely benefit from the development of ultrasensitive light detectors, as the combined readout of the bolometric and light signals enables the particle identification. The CALDER collaboration is developing cryogenic light detectors that will match the requirements of next generation experiments: noise lower than 20 eV RMS, large active area (several cm $$^{2}$$ ), wide temperature range of operation, and ease in fabricating and operating a thousand of detectors. For this purpose, we are exploiting the excellent energy resolution and the natural multiplexed read-out provided by kinetic inductance detectors (KIDs). These devices can be operated in a phonon-mediated approach, in which KIDs are coupled to a large insulating substrate in order to increase the active surface from a few mm $$^{2}$$ to 25 cm $$^{2}$$ . Our current best prototype, based on aluminum LEKIDs, reached a baseline sensitivity of 80 eV with an overall efficiency of about 20 %.

Design and Fabrication of the KID-Based Light Detectors of CALDER

The goal of the Cryogenic wide-Area Light Detectors with Excellent Resolution project is the development of light detectors with large active area and noise energy resolution smaller than 20 eV RMS using phonon-mediated kinetic inductance detectors. The detectors are developed to improve the background suppression in large-mass bolometric experiments such as CUORE, via the double read-out of the light and the heat released by particles interacting in the bolometers. In this work, we present the design and the fabrication process, starting from the silicon wafer arriving to the single chip. The Al thin films (40 nm) are evaporated on high-quality, high-resistivity (>\(10\,\mathrm{k \Omega }\,\)cm) Si(100) substrates using an electron beam evaporator in a high-vacuum chamber. Detectors are patterned in direct-write mode, using electron beam lithography , positive tone resist poly-methyl methacrylate and lift-off process. Finally the wafer is diced into 20 \(\times \) 20 mm\(^2\) chips and assembled in a holder OFHC copper (oxygen-free high conductivity) using PTFE supports.

Characterization of the KID-Based Light Detectors of CALDER

The aim of the Cryogenic wide-Area Light Detectors with Excellent Resolution (CALDER) project is the development of light detectors with active area of $5\times5$ cm$^2$ and noise energy resolution smaller than 20 eV RMS, implementing phonon-mediated kinetic inductance detectors. The detectors are developed to improve the background suppression in large-mass bolometric experiments such as CUORE, via the double read-out of the light and the heat released by particles interacting in the bolometers. In this work, we present the characterization of the first light detectors developed by CALDER. We describe the analysis tools to evaluate the resonator parameters (resonant frequency and quality factors) taking into account simultaneously all the resonance distortions introduced by the read-out chain (as the feed-line impedance and its mismatch) and by the power stored in the resonator itself. We detail the method for the selection of the optimal point for the detector operation (maximizing the signal-to-noise ratio). Finally, we present the response of the detector to optical pulses in the energy range of 0-30 keV.

Energy resolution and efficiency of phonon-mediated kinetic inductance detectors for light detection

The development of sensitive cryogenic light detectors is of primary interest for bolometric experiments searching for rare events like dark matter interactions or neutrino-less double beta decay. Thanks to their good energy resolution and the natural multiplexed read-out, Kinetic Inductance Detectors (KIDs) are particularly suitable for this purpose. To efficiently couple KIDs-based light detectors to the large crystals used by the most advanced bolometric detectors, active surfaces of several cm2 are needed. For this reason, we are developing phonon-mediated detectors. In this paper, we present the results obtained with a prototype consisting of four 40 nm thick aluminum resonators patterned on a 2 × 2 cm2 silicon chip, and calibrated with optical pulses and X-rays. The detector features a noise resolution σE = 154 ± 7 eV and an (18 ± 2)% efficiency.