Optical Scan Range Research Articles

Time-domain slicing optical frequency domain reflectometry.

A time-domain slicing (TDS) optical frequency domain reflectometry is proposed for large strain sensing with better spatial resolution. Compared with the conventional frequency domain slicing (FDS) method, the TDS with a Burg spectrum estimation is capable of enhancing the similarity of a local spectrum under large strain and mostly suppressing the fake peaks during the strain resolving. The experimental results demonstrated that it enables measurements of strain ranging from 600 to 4200 µε with a spatial resolution of 2.4 mm and a narrow optical frequency scanning range of only 10 nm. Moreover, the measurement accuracy is improved by six times by decreasing the root mean square error (RMSE) from 8.6611 to 1.3396 µε without any hardware modification.

High-speed wide-field multi-parametric photoacoustic microscopy.

Capable of imaging blood perfusion, oxygenation, and flow simultaneously at the microscopic level, multi-parametric photoacoustic microscopy (PAM) has quickly emerged as a powerful tool for studying hemodynamic and metabolic changes due to physiological stimulations or pathological processes. However, the low scanning speed poised by the correlation-based blood flow measurement impedes its application in studying rapid microvascular responses. To address this challenge, we have developed a new, to the best of our knowledge, multi-parametric PAM system. By extending the optical scanning range with a cylindrically focused ultrasonic transducer (focal zone, 76µm×4.5mm) for simultaneous acquisition of 500 B-scans, the new system is 112 times faster than our previous multi-parametric system that uses a spherically focused transducer (focal diameter, 40 µm) and enables high-resolution imaging of blood perfusion, oxygenation, and flow over an area of 4.5×1mm2 at a frame rate of 1 Hz. We have demonstrated the feasibility of this system in the living mouse ear. Further development of this system into reflection mode will enable real-time cortex-wide imaging of hemodynamics and metabolism in the mouse brain.

Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT.

We report an ultralow-voltage, electrothermal (ET) micro-electro-mechanical system (MEMS) based probe for forward-viewing endoscopic optical coherence tomography (OCT) imaging. The fully assembled probe has a diameter of 5.5mm and a length of 55mm, including the imaging optics and a 40mm long fiber-optic cantilever attached on a micro-platform of the bimorph ET MEMS actuator. The ET MEMS actuator provides a sufficient mechanical actuation force as well as a large vertical displacement, achieving up to a 3mm optical scanning range with only a 3 VACp-p drive voltage with a 1.5 VDC offset. The imaging probe was integrated with a swept-source OCT system of a 100kHz A-scan rate, and its performance was successfully demonstrated with cross-sectional imaging of biological tissues ex vivo and in vivo at a speed up to 200 frames per second.

Optical coherence tomography endoscopic probe based on a tilted MEMS mirror.

This paper reports a compact microendoscopic OCT probe with an outer diameter of only 2.7 mm. The small diameter is enabled by a novel 2-axis scanning MEMS mirror with a preset 45° tilted angle. The tilted MEMS mirror is directly integrated on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the mirror plate via a set of bimorph flexure, enabling a compact probe mount design without the requirement of a 45° slope, which is capable to dramatically reduce the probe size and ease the assembly process. Additionally, the SiOB also provides trenches with properly-designed opening widths for automatic alignment of the MEMS mirror, GRIN lens and optical fiber. The 45°-tilted MEMS mirror plate is actuated by four electrothermal bimorph actuators. The packaged 2.7 mm-diameter probe offers 2-axis side-view optical scanning with a large optical scan range of 40° at a low drive voltage of 5.5 Vdc in both axes, allowing a lateral scan area of 2.2 mm × 2.2 mm at a 3 mm working distance. High-resolution 2D and 3D OCT images of the IR card, ex vivo imaging of meniscus specimens and rat brain slices, in vivo imaging of the human finger and nail have been obtained with a TDOCT system.

Design of high-performance adaptive objective lens with large optical depth scanning range for ultrabroad near infrared microscopic imaging.

We report on the theory and design of adaptive objective lens for ultra broadband near infrared light imaging with large dynamic optical depth scanning range by using an embedded tunable lens, which can find wide applications in deep tissue biomedical imaging systems, such as confocal microscope, optical coherence tomography (OCT), two-photon microscopy, etc., both in vivo and ex vivo. This design is based on, but not limited to, a home-made prototype of liquid-filled membrane lens with a clear aperture of 8mm and the thickness of 2.55mm ~3.18mm. It is beneficial to have an adaptive objective lens which allows an extended depth scanning range larger than the focal length zoom range, since this will keep the magnification of the whole system, numerical aperture (NA), field of view (FOV), and resolution more consistent. To achieve this goal, a systematic theory is presented, for the first time to our acknowledgment, by inserting the varifocal lens in between a front and a back solid lens group. The designed objective has a compact size (10mm-diameter and 15mm-length), ultrabroad working bandwidth (760nm - 920nm), a large depth scanning range (7.36mm in air) - 1.533 times of focal length zoom range (4.8mm in air), and a FOV around 1mm × 1mm. Diffraction-limited performance can be achieved within this ultrabroad bandwidth through all the scanning depth (the resolution is 2.22 μm - 2.81 μm, calculated at the wavelength of 800nm with the NA of 0.214 - 0.171). The chromatic focal shift value is within the depth of focus (field). The chromatic difference in distortion is nearly zero and the maximum distortion is less than 0.05%.

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of ±10 deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6×3.6 mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array—consisting of five hybrid assembled MEMS devices—is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1 MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.

Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias.

A resonance scanning grating based on SOI for microspectrometer application

A scanning grating is designed and fabricated as a significant dispersing component of a microspectrometer. The designed scanning grating utilizes the slight vertical comb offsets induced mainly by the fabrication imperfections and residual stress in silicon on insulator (SOI) as starting electrodes. According to the spectral resolution and resonance frequency requirements, the scanning grating structure parameters are determined. Based on an SOI substrate, a V-shaped grating structure (〈111〉 plane with an angle of 54.74° to the surface of a 〈100〉 silicon substrate) can be obtained by wet etching on the microscanning mirror plate (3 × 3 mm2). Some measuring principles and experimental results on the main performance of the scanning grating including the resonance frequency, deflection angle and diffraction efficiency are discussed in detail. The mechanical deflection angle of the scanning grating can reach ±5°, corresponding to an optical scan range of 20° at a driving voltage of 30 V.

Full field measurements and identification in Solid Mechanics Depth-resolved Phase Imaging

Traditional full-field interferometric techniques (speckle, moiré, holography etc) encode the surface deformation state of the object under test in the form of 2-D phase images. Over the past 10 years, a family of related techniques (Wavelength Scanning Interferometry, Phase Contrast Spectral Optical Coherence Tomography (OCT), Tilt Scanning Interferometry and Hyperspectral Interferometry) has emerged that allows one to measure the volume deformation state within weakly-scattering objects. The techniques can be thought of as combining the phase-sensing capabilities of Phase Shifting Interferometry and the depth-sensing capabilities of OCT. This paper provides an overview of the techniques, and describes a theoretical framework based on the Ewald sphere construction that allows key parameters such as depth resolution and displacement sensitivity to be calculated straightforwardly for any given optical geometry and wavelength scan range. Finally, the related issue of robust phase unwrapping of noisy 3-D wrapped phase volumes is also described.

Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives

A scanning micromirror suspended by a pair of V-shaped beams with vertical electrostatic comb drives was designed, modeled, fabricated and characterized. The dynamic analyses were carried out by both theory calculation and FEM simulation to obtain frequency response, stiffness characteristics, oscillation modes and their resonance frequencies. The device was fabricated using the silicon-on-insulator process by only two photolithography masks. Some problems during the process such as the micromirror distortion and the side sticking of the comb fingers were effectively solved by thermal annealing and alcohol-replacement methods, respectively. Based on the fabricated device, the typical scanning patterns for 1-D and 2-D operation were obtained. The experimental results reveal that the micromirror can work in resonant mode with the resonant frequency of 2.38 kHz. The maximum deflection angles can reach ±4.8°, corresponding to a total optical scanning range of 19.2° at a driving voltage of 21 V.

A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

We report a circular micromirror with a 1 mm aperture that has an optical scan range of 60° at 0.68 V applied voltage and 11 mW power input. The mirror is actuated by a semicircular aluminum (Al)–tungsten (W) electrothermal multimorph that bends and twists upon controlled Joule heating. W acts as an active layer of the multimorph and a resistive heater. The curved actuator design not only maximizes the efficiency of chip area usage, but also achieves high resonant frequency due to torsional stiffness encountered during beam deformation. The first three resonant modes of the micromirror are at 104 Hz, 400 Hz and 416 Hz, respectively. Two-dimensional (2D) optical scanning is demonstrated by using the second resonant mode. The low power consumption may be attributed to the use of a single actuator beam. Mirror-center shift produced by actuator bending and twisting partially compensate each other and this results in 1.6 times lower center-shift compared to previously reported straight multimorph based designs. Device fabrication involves surface and bulk micromachining on an SOI wafer.

An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micromachining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of plusmn30deg about both x- and y-axes and displaces 480 mum in the z-axis, all at dc voltages that are less than 8 V. Dynamic testing of the micromirror shows that the thermal response time of each actuator is about 10 ms. Resonant frequencies of the piston and rotation motion are 336 and 488 Hz, respectively. The unique structural design of the device ensures that there is no lateral shift for the piston motion and no rotation-axis shift for the rotation scanning. With the large tip-tilt-piston scan ranges and low driving voltage, this type of device is very suitable for biomedical imaging and laser beam steering applications.

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V.

Optical scanners realized by surface-micromachined vertical torsion mirror

We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 /spl mu/m/spl times/250 /spl mu/m scanner is 238.