Recently we have studied the concentration N2D of 2D Ge island nucleated on large-scale Si(111)-(7 × 7) terraces at 550 − 650 °C as function of the substrate temperature T and Ge deposition rate R [J. Cryst. Growth. 531 (2020) 125347], where we have shown that N2D(R) dependence is characterized by a power law with scaling exponent χ = 1 ± 0.1. However, in the frames of classical Venables rate-equation approach, the obtained range of χ values do not allow one to unambiguously determine the critical nucleus size i, since χ = 1 ± 0.1 can be attributed to both diffusion limited (DL) and attachment limited (AL) growth regimes. In order to determine an exact i size and growth kinetics, in this work, we have investigated the scaled capture-zone distribution (CZD) of nucleated 2D Ge islands on the same Ge/Si(111)-(7 × 7) samples and described it by the generalized Wigner distribution Pβ=aβAβexp-bβA2, where Pβ is the probability density of getting into some region of capture zone values, A is normalized Voronoi cell area for 2D island, β=iχ is scaling parameter directly related to the critical nucleus size i. It has been shown that the kinetics of 2D Ge island nucleation on the wide Si(111)-(7 × 7) terraces at elevated temperatures should procced under AL growth kinetics with i = 3–5 particles.
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