We have investigated the formation of a catalyst for the synthesis of multi-walled carbon nanotubes (MWCNT) using nickel-on-titanium thin films. Nickel decomposes into nanoparticles in the synthesis setup prior to MWCNT growing through the plasma enhanced chemical vapor deposition method. Oxidation and reduction of the catalyst are conducted to control the morphology of the formed nanoparticles array. In this case, the redox treatments required preventing the formation of silicides and Ti–Ni alloys are combined with the well-known effect of low-temperature disintegration (dewetting) of thin films. Detailed studies using a combination of Auger, atomic force, scanning (SEM), and transmission electron microscopy (TEM) show the interaction of metals on a silicon substrate, the influence of treatments parameters on the catalyst's state. The features and morphology of MWCNT synthesized on the obtained catalysts were studied via Raman spectroscopy, SEM and TEM. Overall, showing a link between the catalyst formation process and MWCNT growth, we demonstrate a technological and versatile method for controlling of nanotube growth for various applications.
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