Mid-infrared Spectroscopic Ellipsometry Research Articles

Infrared dielectric functions, phonon modes, and free-charge carrier properties of high-Al-content AlxGa1−xN alloys determined by mid infrared spectroscopic ellipsometry and optical Hall effect

We report on the analysis of a combined mid-infrared spectroscopic ellipsometry and mid-infrared optical Hall effect investigation of wurtzite structure c-plane oriented, crack-free, single crystalline, and high-Al-content AlxGa1−xN layers on 4H-SiC. For high-Al-content AlxGa1−xN, a two mode behavior is observed for both transverse and longitudinal branches of the infrared-active modes with E1 symmetry, while a single mode behavior is found for the longitudinal modes with A1(LO) symmetry. We report their mode dependencies on the Al content. We determine and discuss static and high frequency dielectric constants depending on x. From the analysis of the optical Hall effect data, we determine the effective mass parameter in high-Al-content AlxGa1−xN alloys and its composition dependence. Within the experimental uncertainty limits, the effective mass parameters are found isotropic, which depend linearly on the Al content. The combination of all data permits the quantification of the free electron density N and mobility parameters μ.

Electron effective mass in Al0.72Ga0.28N alloys determined by mid-infrared optical Hall effect

The effective electron mass parameter in Si-doped Al0.72Ga0.28N is determined to be m∗=(0.336±0.020) m0 from mid-infrared optical Hall effect measurements. No significant anisotropy of the effective electron mass parameter is found supporting theoretical predictions. Assuming a linear change of the effective electron mass with the Al content in AlGaN alloys and m∗=0.232 m0 for GaN, an average effective electron mass of m∗=0.376 m0 can be extrapolated for AlN. The analysis of mid-infrared spectroscopic ellipsometry measurements further confirms the two phonon mode behavior of the E1(TO) and one phonon mode behavior of the A1(LO) phonon mode in high-Al-content AlGaN alloys as seen in previous Raman scattering studies.

Temperature dependent effective mass in AlGaN/GaN high electron mobility transistor structures

The temperature-dependence of free-charge carrier mobility, sheet density, and effective mass of a two-dimensional electron gas in a AlGaN/GaN heterostructure deposited on SiC substrate is determined using the THz optical Hall effect in the spectral range from 0.22 to 0.32 THz for temperatures from 1.5 to 300 K. The THz optical Hall-effect measurements are combined with room temperature mid-infrared spectroscopic ellipsometry measurements to determine the layer thickness, phonon mode, and free-charge carrier parameters of the heterostructure constituents. An increase of the electron effective mass from (0.22±0.01)m0 at 1.5 K to (0.36±0.03)m0 at 300 K is observed, which is indicative for a reduction in spatial confinement of the two-dimensional electron gas at room temperature. The temperature-dependence of the mobility and the sheet density is in good agreement with electrical measurements reported in the literature.

Optical arrangement and proof of concept prototype for mid infrared variable angle spectroscopic ellipsometry

We present an optical setup for variable angle mid infra red spectroscopic ellipsometry. The arrangement can be placed into the sample compartment of a Bruker ifs66v/s vacuum Fourier transform infrared spectrometer. A first prototype of the setup has been tested in the spectral range from 650 cm −1 to 4000 cm −1 and can measure incidence angles between 8° and 87°. We compare the measured data to reference measurements with a commercial variable angle infrared spectroscopic ellipsometer. The comparison gives a proof of concept for the discussed optical arrangement.

Terahertz optical-Hall effect characterization of two-dimensional electron gas properties in AlGaN/GaN high electron mobility transistor structures

The free-charge carrier mobility, sheet density, and effective mass of a two-dimensional electron gas are exemplarily determined in the spectral range from 640 GHz to 1 THz in a AlGaN/GaN heterostructure using the optical-Hall effect at room temperature. Complementary midinfrared spectroscopic ellipsometry measurements are performed for analysis of heterostructure constituents layer thickness, phonon mode, and free-charge carrier parameters. The electron effective mass is determined to be (0.22±0.04)m0. The high-frequency sheet density and carrier mobility parameters are in good agreement with results from dc electrical Hall effect measurements, indicative for frequency-independent carrier scattering mechanisms of the two-dimensional carrier distribution.

Optical and thermoelectric characterizations of electroplated n-Bi 2(Te 0.9Se 0.1) 3

Bismuth selenotelluride (Bi 2(Te 0.9Se 0.1) 3) films were electrodeposited at constant current density from acidic aqueous solutions with Arabic gum in order to produce thin films for miniaturized thermoelectric devices. X-ray fluorescence spectroscopy determined film compositions. X-ray diffraction pattern shows that the films as deposited are polycrystalline, isostructural to Bi 2Te 3 and covered by crystallites. Mueller-matrix analysis reveals that the electroplated layers are optically like an isotropic medium. Their pseudo-dielectric functions were determined using mid-infrared spectroscopic ellipsometry. Tauc–Lorentz combined with Drude dispersion relations were successfully used. The energy band gap E g was found to be about 0.15 eV. Moreover, the fundamental absorption edge was described by an indirect optical band-to-band transition. From Seebeck coefficient measurement, films exhibit n-type charge carrier and the value of thermoelectric power is about −40 μV/K.