Microfabrication Techniques Research Articles

Development of eutectic gallium-indium-based transparent conductive electrodes on flexible substrates for touch sensor integration

In this study, the adaptability of liquid metal (LM)-based transparent conductive electrodes (TCEs) to flexible substrates and their potential applications in various electronics fields were investigated. To achieve this, conventional microfabrication techniques were employed to pattern polydimethylsiloxane (PDMS) channels and introduce an Eutectic Gallium-Indium (EGaIn) LM with the aim of enhancing transmittance and reducing sheet resistance. Microfluidic channel structures with varying pitch lengths and widths were fabricated in the types of grid patterns, labeled Pattern A (2000 μm pitch, 40 μm width), Pattern B (2000 μm pitch, 80 μm width), Pattern C (200 μm pitch, 40 μm width), and Pattern D (200 μm pitch, 80 μm width. The corresponding average transmittance values for the EGaIn LM-based TCE were 90 %, 71.8 %, 61.8 %, and 43.2 % for Patterns A, B, C, and D, respectively. To illustrate the potential in touch sensor applications, resistance changes in Patterns A, B, C, and D were assessed under applied forces ranging from 0 N to 150 N, revealing resistance changes of 0.0265 Ω, 0.03617 Ω, 0.03977 Ω, and 0.11629 Ω, respectively.

Investigation of droplet boiling on superhydrophilic CuO multiscale hierarchical structured surfaces

This work presents the experimental investigation of droplet boiling characteristics on superhydrophilic surfaces. These surfaces are prepared on a copper substrate, and the boiling characteristics are studied and compared with the bare copper surface. Two types of superhydrophilic surfaces exhibiting needle-like (CuO-1) and sheet-like (CuO-2) nanostructures are prepared by the chemical etching oxidation technique. The hierarchical surface structures are characterized by carrying out SEM and XRD analysis. We employ high-speed imaging along with temperature measurement to characterize the heat transfer phenomenon. The surface temperature varies from 100 °C to 190 °C, and the Weber number is maintained constant at 2.78, corresponding to the gentle droplet impact regime. The effectiveness in the heat transfer performance of the different surfaces is characterized by measuring the critical heat flux (CHF) and the Leidenfrost point (LFP), and it is correlated with the surface properties viz. roughness, wettability, and porosity. The superhydrophilic surface alteration reduces the contact angle by about 99.7% compared to the bare surface. This reduction in contact angle corresponds to an increase in Critical Heat Flux (CHF) by 69.95% for CuO-1 and 47.17% for CuO-2, respectively, compared to bare copper. It is also seen that the LFP is delayed on the superhydrophilic surfaces, with an increase in the LFP temperature by 16.67% and 14.28% for CuO-1 and CuO-2 coatings, respectively. The effect of structures on the atomization and formation of secondary droplets is also presented. We report the contact coefficient (kw) for superhydrophilic surfaces for the first time, which is helpful in the theoretical prediction of CHF. These results show that significant improvement in heat transfer can be obtained in spray cooling and hot spot cooling applications without resorting to sophisticated microfabrication techniques.

Procedure in developing a longitudinal-torsional vibration-assisted micro-milling system

Micromachining is an advanced microfabrication technique for micro-sized or micro-accuracy products through subtractive manufacturing such as micro-milling. Vibration-assisted machining (VAM) is a method in which small amplitude vibrations are applied to the tool or workpiece to enhance the fabrication process. Milling results could be improved by adding longitudinal and torsional vibration to the tool using piezoelectric components vibrating at the ultrasonic frequency with an amplitude of less than 1 μm is used. A slip ring is required to transmit electric power from a static structure to a rotating frame. After the power has been transmitted to the system, an ultrasonic horn, called an acoustic horn or sonotrode, amplifies the vibrations at the tool’s tip. Since the excitation vibration is only longitudinal, the magnification of the vibration at the tooltip is also only longitudinal. Grooves are added to the side of the ultrasonic horn to produce torsional vibrations. This vibration is then simulated through finite element analysis software, explicitly using explicit dynamics. A 3D simulation is run for a quarter cycle of micro-milling through a Ti-6Al-4V material. It could be concluded that the LTVAM application may improve machining quality, such as temperature reduction of up to 9%, cutting force reduction of up to 35%, and surface roughness improvement of up to 27%.

Revolutionizing Antibacterial Surfaces: 3D Printed Nanoscale and Microscale Topographies through Two-Photon Polymerization

The evolving bacteria defense mechanism against antimicrobial agents due to the overuse and misuse of antimicrobial chemicals has led to a catastrophic problem - antimicrobial resistance, this has spurred the quest for innovative antibacterial approach to inhibit bacterial growth effectively without using any chemicals. Tailored nano- and microstructured architecture, inspired by natural nanotopography such as those found on cicada wings, hold great promise in antibacterial activity due to their unique mechano-antibacterial properties. Among the various nano-/microfabrication techniques, the two-photon polymerisation (TPP) stands out as a versatile and precise approach to fabricate arbitrarily functional three-dimensional structures with sub-micrometre resolution. The process involves the use of femtosecond laser pulses to induce polymerization of a biocompatible acrylate-based photoresin in a precise spatial pattern to generate the nano-/microarchitecture. In this study, we investigated the influence of key fabrication parameters, such as laser power, exposure time, and interface value to achieve the final pre-defined nano-/microarchitecture. Microscopy analysis showed that nanostructure of heights between 350-650 nm; 300-400 nm diameter; and increasing center-to-center distances of 700-2000 nm were successfully fabricated. The mechano-antibacterial feasibility of the two photon-designed nanoarchitecture were tested against P. aeruginosa pathogenic bacteria commonly encountered in healthcare settings. Our results showed that the TPP nano-/microarchitecture demonstrated intriguing antibacterial activity through physico-mechanical interactions between the nano-/microarchitectures and bacteria, creating surfaces that exhibit bactericidal activity. This study paves the way for advanced antibacterial applications in the field of nanotechnology and biomedicine, making a significant contribution to the ongoing efforts in combating antimicrobial resistance and promoting global health.

Two-dimensional (2D) materials for 3D printed micro-supercapacitors and micro-batteries

Two-dimensional (2D) materials display a unique set of physical/chemical properties and are considered potential building blocks for the manufacturing of microstructured materials for a number of applications. Prominent applications range from advanced electronics to miniaturized electrochemical energy storage devices (EESDs). Herein, we present a comprehensive and critical review of the recent developments in design and microfabrication of 2D-driven microscale electrodes for three-dimensional (3D)-printed micro-supercapacitors and micro-batteries. Firstly, we systematically discuss the advantages and disadvantages associated with various microfabrication techniques such as stereolithography, fused deposition modeling, inkjet printing, and direct ink writing. Next, key parameters disclosing the relationship between the characteristics of 2D-based materials and extrusion-driven 3D printing process for the development of versatile and sustainable EESDs are highlighted. 2D materials utilized for the construction of microelectrodes for supercapacitors (e.g., electric double layer capacitors (EDLCs), pseudocapacitors, and hybrid capacitors) and batteries (e.g., Li-based systems and next-generation systems, e.g., sodium-ion batteries and zinc-ion batteries) along with their prominent electrochemical contributions in relation to obtained 3D-printed architectures are discussed in detail. To promote the development of 2D materials-driven high-performance microscale EESDs, the relevant challenges and future research opportunities are also addressed.

Nature‐Inspired Directional Microneedle Structures for Reversible Gripping on Skin and Fibrous Materials

Plants such as Galium aparine show directional gripping to various surfaces because of their microscale hook structures. A bio‐inspired artificial version of microhooks holds potential as a bidirectional, reversible, and reusable dry adhesive for soft, wet, or fibrous substrates such as skin or textiles. However, current methods for fabricating 3D structures are often costly, time‐consuming, or require precise alignment steps. Herein, a facile, cost‐effective, scalable, and unconventional microfabrication technique is proposed using tilted photolithography on a rotary stage and shear molding to fabricate a soft polydimethylsiloxane polymer mold containing the inverse replica of directional microneedle structures. To demonstrate the proof‐of‐concept, polyurethane is then added to the mold to obtain directional microneedles, referred to as microhooks. Friction force measurements using a nanotribometer show anisotropic performance (strong attachment in one direction and easy detachment in the opposite direction over multiple cycles) similar to the natural microhooks. Tribological characterization of the microhooks shows a gripping force 2.25 times greater than the sliding force. The fabricated microhook structures also provide an adhesion force of ≈0.62 N cm−2 to artificial skin. This biomimetic approach promises precise adhesion control and material versatility for attaching wearable devices and patches to the skin in biomedical applications.

Loading-effect-based three-dimensional microfabrication empowers on-chip Brillouin optomechanics.

The acousto-optic interaction known as stimulated Brillouin scattering (SBS) has emerged as a fundamental principle for realizing crucial components and functionalities in integrated photonics. However, the main challenge of integrating Brillouin devices is how to effectively confine both optical and acoustic waves. Apart from that, the manufacturing processes for these devices need to be compatible with standard fabrication platforms and streamlined to facilitate their large-scale integration. Here, we demonstrate a novel, to the best of our knowledge, suspended nanowire structure that can tightly confine photons and phonons. Furthermore, tailored for this structure, we introduce a loading-effect-based three-dimensional microfabrication technique, compatible with complementary metal-oxide-semiconductor (CMOS) technology. This innovative technique allows for the fabrication of the entire structure using a single-step lithography exposure, significantly streamlining the fabrication process. Leveraging this structure and fabrication scheme, we have achieved a Brillouin gain coefficient of 1100 W-1m-1 on the silicon-on-insulator platform within a compact footprint. It can support a Brillouin net gain over 4.1 dB with modest pump powers. We believe that this structure can significantly advance the development of SBS on chip, unlocking new opportunities for a large-scale integration of Brillouin-based photonic devices.

Research Progress in Nano Materials and Structural Designs for Flexible Piezoresistive Sensors

This review provides an overview of recent advances in the materials and structural design of flexible piezoresistive sensors, which are of significant interest as smart devices in the Fourth Industrial Revolution. Recent research has focused on addressing demand for a wide pressure range and high sensitivity for use in diverse applications. In terms of sensor materials, this review begins by introducing elastomers used for matrix and substrate, which provide exceptional conformability to curved surfaces and mechanical flexibility to withstand stretching and bending. They can also incorporate sensing materials in various forms of nanostructures capable of effectively transmitting electrical signals, exploiting the nanomaterial’s electrical properties and conductivity pathways formation mechanisms under pressure, which define the sensor’s characteristics. Additionally, this review explores structural design considerations, including different types of microstructures that can deform easily even under low pressure, enhancing sensor sensitivity, as well as hierarchical structures capable of gradual changes in contact area to provide a wide range of operating pressures. Moreover, the review discusses time- and cost-efficient microfabrication techniques to facilitate practical utilization of the device. This review then summarizes the applications of high-performance sensors in fields such as health monitoring, including pulse detection and motion tracking, robotics, and human-machine interaction involving components such as touch screens and keypads.

Wearable ultrasound technology

The use of wearable electronic devices that can acquire vital signs from the human body noninvasively and continuously is a significant trend for healthcare. The combination of materials design and advanced microfabrication techniques enables the integration of various components and devices onto a wearable platform, resulting in functional systems with minimal limitations on the human body. Physiological signals from deep tissues are particularly valuable as they have a stronger and faster correlation with the internal events within the body compared to signals obtained from the surface of the skin. In this presentation, I will demonstrate a soft ultrasonic technology that can noninvasively and continuously acquire dynamic information about deep tissues and central organs. I will also showcase examples of this technology's use in recording blood pressure and flow waveforms in central vessels, monitoring cardiac chamber activities, and measuring core body temperatures. The soft ultrasonic technology presented represents a platform with vast potential for applications in consumer electronics, defense medicine, and clinical practices.

The intersection of mechatronics and precision engineering: Synergies and future directions

The convergence of mechatronics and precision engineering has sparked significant interest due to its potential to revolutionize various industries, ranging from manufacturing to healthcare. This review explores the synergies between these two domains and outlines potential future directions for research and application. Mechatronics, an interdisciplinary field combining mechanical engineering, electrical engineering, computer science, and control engineering, focuses on the design and development of intelligent systems with integrated sensing, actuation, and control capabilities. Precision engineering, on the other hand, emphasizes the fabrication of high-accuracy components and systems, often at micro or nanoscales, to meet stringent performance requirements. The intersection of mechatronics and precision engineering offers numerous synergistic opportunities. One such opportunity lies in the development of precision actuators and sensors with embedded intelligent control systems, enabling precise motion control and feedback mechanisms in complex systems. Furthermore, advancements in microfabrication techniques allow for the integration of sensors and actuators directly onto precision components, leading to miniaturized and efficient mechatronic systems. In manufacturing, this synergy facilitates the creation of highly automated and flexible production processes capable of producing intricate and high-quality products with minimal human intervention. In healthcare, it enables the development of precision medical devices for diagnostics, surgery, and drug delivery, enhancing patient outcomes and reducing the invasiveness of procedures. Future directions in this interdisciplinary field include exploring novel materials and manufacturing techniques to further improve the precision and performance of mechatronic systems. Additionally, advancements in artificial intelligence and machine learning are poised to enhance the autonomy and adaptability of mechatronic systems, enabling them to learn from data and adapt to changing environments in real-time. the intersection of mechatronics and precision engineering holds great promise for addressing complex engineering challenges and driving innovation across various industries. By leveraging their complementary strengths, researchers and engineers can unlock new opportunities to create smarter, more efficient, and more precise systems with transformative impacts on society.

Thermal performance improvement in wavy microchannels using secondary channels

PurposeThis study aims to minimize the pressure drop across wavy microchannels using secondary branches without compromising its capacity to transfer the heat. The impact of secondary flows on the pressure drop and heat transfer capabilities at different Reynolds numbers are investigated numerically for different wavy microchannels. Finally, different channels are evaluated using performance evaluation criteria to determine their effectiveness.Design/methodology/approachTo investigate the flow and heat transfer capabilities in wavy microchannels having secondary branches, a 3D conjugate heat transfer model based on finite volume method is used. In conventional wavy microchannel, secondary branches are introduced at crest and trough locations. For the numerical simulation, a single symmetrical channel is used to minimize computational time and resources and the flow within the channels remains single-phase and laminar.FindingsThe findings indicate that the suggested secondary channels notably improve heat transfer and decrease pressure drop within the channels. At lower flow rates, the secondary channels demonstrate superior performance in terms of heat transfer. However, the performance declines as the flow rate increased. With the same amplitude and wavelength, the introduction of secondary channels reduces the pressure drop compared with conventional wavy channels. Due to the presence of secondary channels, the flow splits from the main channel, and part of the core flow gets diverted into the secondary channel as the flow takes the path of minimum resistance. Due to this flow split, the core velocity is reduced. An increase in flow area helps in reducing pressure drop.Practical implicationsMany complex and intricate microchannels are proposed by the researchers to augment heat dissipation. There are challenges in the fabrication of microchannels, such as surface finish and achieving the required dimensions. However, due to the recent developments in metal additive manufacturing and microfabrication techniques, the complex shapes proposed in this paper are feasible to fabricate.Originality/valueWavy channels are widely used in heat transfer and micro-fluidics applications. The proposed wavy microchannels with secondary channels are different when compared to conventional wavy channels and can be used practically to solve thermal challenges. They help achieve a lower pressure drop in wavy microchannels without compromising heat transfer performance.

Non-metallic magnetostatically tunable metasurface absorber for terahertz waves

A non-metallic metasurface absorber containing VO2, InSb, and Teflon has been designed, simulated, and investigated for normally incident plane waves in the terahertz spectral regime. When the temperature exceeds 72°C, a backing layer of VO2 in its rutile phase instead of a conventional metal virtually eliminates transmission. Peak absorptance as high as 0.998, quality factor on the order of 200, and magnetostatic tunability of about 16GHz\, T−1 are achievable. Such metasurfaces can be made using standard microfabrication techniques.

Recording Quality Is Systematically Related to Electrode Impedance.

Extracellular recordings with planar microelectrodes are the gold standard technique for recording the fast action potentials of neurons in the intact brain. The introduction of microfabrication techniques has revolutionized the in vivo recording of neuronal activity and introduced high-density, multi-electrode arrays that increase the spatial resolution of recordings and the number of neurons that can be simultaneously recorded. Despite these innovations, there is still debate about the ideal electrical transfer characteristics of extracellular electrodes. This uncertainty is partly due to the lack of systematic studies comparing electrodes with different characteristics, particularly for chronically implanted arrays over extended time periods. Here a high-density, flexible, and thin-film array is fabricated and tested, containing four distinct electrode types differing in surface material and surface topology and, thus, impedance. It is found that recording quality is strongly related to electrode impedance with signal amplitude and unit yield negatively correlated to impedance. Electrode impedances are stable for the duration of the experiment (up to 12 weeks) and recording quality does not deteriorate. The findings support the expectation from the theory that recording quality will increase as impedance decreases.

Validating the Transition Criteria from the Cassie-Baxter to the Wenzel State for Periodically Pillared Surfaces with Lattice Boltzmann Simulations.

Microfabrication techniques allow the development and production of artificial superhydrophobic surfaces that possess a precisely controlled roughness at the micrometer level, typically achieved through the arrangement of micropillar structures in periodic patterns. In this work, we analyze the stability and energy barrier of droplets in the Cassie-Baxter (CB) state on such periodic patterns. In addition, we further develop a transition criterion using the CB equation and derive an improved version which allows predicting for which pillar geometries, equilibrium contact angles, and droplet volumes the CB state switches from a metastable to an unstable state. This enables a comparison with existing experiments and three-dimensional multiphase Lattice Boltzmann simulations for different pillar distances, two contact angles, and two droplet volumes, where a good agreement has been found.

Isoelectric trapping and discrimination of histones from plasma in a microfluidic device using dehydrated isoelectric gate.

Histones are basic proteins with an isoelectric point around 11. It has been shown that the level of plasma circulating histones increases significantly during sepsis, and circulating free histones are associated with sepsis severity and mortality. It was found that the median plasma total free histone concentration of sepsis ICU non-survivors is higher compared to survivors. Therefore, histone concentration can serve as a prognostic indicator and there is a need for a simple, low-cost, and rapid method for measuring histone levels. In this work, we have developed a microfluidic device containing an isoelectric membrane made of dehydrated agarose gel of a specific pH embedded in a porous membrane for isoelectric trapping of histones rapidly. Although isoelectric gates have been used for trapping proteins before, they have to be introduced at the time of the experiment. Here, we show that isoelectric gates formed by gels loaded in a scaffold can be integrated directly into the fabrication process flow, dehydrated for storage, and rehydrated during the experiment and still function effectively to achieve isoelectric trapping. A low-cost and rapid microfabrication technique, xurography, was used for agarose integration and device fabrication. The integrated device was tested with samples containing buffered histone, histone in the presence of high-concentration bovine serum albumin (BSA), and histone spiked in blood plasma. The results show that the device can be used to distinguish between survivors and non-survivors of sepsis in less than 10min, making it suitable as a point-of-care device for sepsis prognosis.

UV laser-processed microstructure for building biohybrid actuators with anisotropic movement

Fabrication of a biohybrid actuator requires muscle cells anisotropically aligned in a line, curve, or combination of lines and curves (similar to the microstructure of living muscle tissue) to replicate lifelike movements, in addition to considering the arrangement of skeletal structure or muscular structure with anisotropic straight patterns. Here, we report a UV laser-processed microstructure for freely directing cellular alignment to engineer a biohybrid actuator composed of poly(styrene-block-butadiene-block-styrene triblock copolymer) (SBS) thin film with tailor-made microgrooves (MGs) and skeletal myotubes aligned along these MGs. Specifically, straight, circular, or curved MGs were transferred to SBS thin films from a UV laser-processed template, allowing for the successful alignment of myotubes along MGs. The biohybrid actuator, composed of anisotropically aligned myotubes on a curved microgrooved SBS thin film, was contracted by electrical stimulation. Contraction of biohybrid actuators with curved aligned myotubes permits twisted-like behavior, unlike straight microgrooved films. Therefore, the UV laser-ablation system is a unique maskless and rapid microfabrication technique that provides intriguing opportunities for omni-directional microgrooved structures to achieve the complex motion of living organisms.

Role of Mo thickness in growth of nanostructured MoO3 and their optical sensing properties

The main objective of the present work is to investigate the role Mo thickness in growth of nanostructured MoO3 and their application for optical sensors like photodetectors. The devices were fabricated using standard scalable microfabrication techniques. MoO3 was synthesized by Mo thin film deposition using sputtering followed by dry oxidation at 550 °C. Further, these samples were tested as photodetectors for visible regions. The test results confirm that the devices are more sensitive towards 450 nm. The photodetector made on 80 nm Mo thickness exhibited a higher responsivity of 730 mA W–1, higher detectivity of 2.47 × 1011 Jones, and higher photo to dark current ratio (PDCR) of 1.33 × 102 compared to other tested samples. Moreover, the optimized photodetector showed higher repeatability and a faster speed of 13/11 ms. These developed photodetectors could be vital for the visible light optical sensing era.

Temperature Sensitivity Control of an Inkjet-Printed Optical Resonator on Pillar.

We report a whispering gallery mode resonator on a pillar using inkjet printing combined with traditional microfabrication techniques. This approach enables several different polymers on the same chip for sensing applications. However, polymers inherently exhibit sensitivity to multiple stimuli. To mitigate temperature sensitivity, careful selection of design parameters is crucial. By precisely tuning the undercut-to-radius ratio of the resonator, a linear dependence in temperature sensitivity ranging from -41.5 pm/°C to 23.4 pm/°C, with a zero-crossing point at 47.6% is achieved. Consequently, it is feasible to fabricate sensing devices based on undercut microdroplets with minimal temperature sensitivity. The lowest measured temperature sensitivity obtained was 5.9 pm/°C, for a resonator with an undercut-to-radius ratio of 53%.

V2O5 based artificial optical synaptic devices for neuromorphic computing

This paper proposed novel V2O5 based optical synaptic devices using wafer scalable microfabrication techniques. These V2O5 optical devices mimic the human brain like functions such as paired pulse facilitation (PPF), short term memory and long term memory. PPF index of 209 % which indicates promising short term memory behavior. The maximum retention time of 3.6 × 103 seconds was achieved. These V2O5 optical devices were used as synapses in an artificial neural network (ANN) to classify digits and alphabets with accuracy of 98.49 % and 97.58 % respectively. Thus, the proposed V2O5 based optical synaptic device integrated for real-world applications can be a breakthrough innovation in recognition that is computationally efficient.

Electron Microscopy of Neurons on Biomimetic Substrates.

Recent advancements in nano- and microfabrication techniques have led to the development of highly biomimetic patterned substrates able to guide neuronal sprouting, routing, elongation, and branching. Such substrates, recapitulating shapes and geometries found in the native brain, may pave the way toward the development of cell instructive paradigms able to guide morphogenesis at the neuron-material interface. In this scenario, high-resolution electron microscopy approaches, owing to their ability of discerning the details of neural morphogenesis at a nanoscale resolution, may play a crucial role in unravelling the fine ultrastructure of neurons interfacing with biomimetic structured substrates.