Switchable mirrors [J.N. Huiberts, R. Griessen, J.H. Rector, R.J. Wijngaarden, J.P. Dekker, D.G. de Groot, N.J. Koeman, Nature 380 (1996) 231; J.N Huiberts, J.H. Rector, R.J. Wijngaarden, S. Jetten, D. de Groot, B. Dam, N.J.. Koeman, R. Griessen, B. Hjörvarsson, S Olafsson, Y.S. Cho, J. Alloys and Compounds 239 (1996) 158; F.J.A. den Broeder, S.J. van der Molen, M. Kremers, J. N. Huiberts, D.G. Nagengast, A.T.M. van Gogh, W.H. Huisman, N. J. Koeman, B. Dam, J.H. Rector, S. Plota, M. Haaksma, R.M.N. Hanzen, R.M. Jungblut, P.A. Duine, R. Griessen, Nature 394 (1998) 656] made of thin films of Y, La or rare-earth (RE) metals exhibit spectacular changes in their optical and electrical properties upon hydrogen loading. The study of these materials has indicated that the occurring phenomena are highly sensitive to the actual hydrogen concentration in these materials.In this paper elastic recoil detection analysis (ERDA) is used as a tool to measure hydrogen concentrations on a micrometer scale. The measurements have been performed using a 4He2+ ion beam from a 1.7 MV Pelletron accelerator. The ion beam can be focused routinely to a spot size of approximately 10 μm2. The experimental set-up enables the simultaneous measurement of Rutherford backscattering spectrometry (RBS) as well as particle induced X-ray emission (PIXE) spectra, which provide complementary information.The results of ERDA measurements on laterally diffused YHx (0<x<3) samples with a qualitatively known hydrogen concentration profile are presented and discussed. The calibration of the microbeam set-up and possible improvement of the measurement technique are described.
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