Micro-optical Components Research Articles

Multi-material multi-photon 3D laser micro- and nanoprinting

Three-dimensional (3D) laser micro- and nanoprinting based upon multi-photon absorption has made its way from early scientific discovery to industrial manufacturing processes, e.g., for advanced microoptical components. However, so far, most realized 3D architectures are composed of only a single polymeric material. Here, we review 3D printing of multi-materials on the nano- and microscale. We start with material properties that have been realized, using multi-photon photoresists. Printed materials include bulk polymers, conductive polymers, metals, nanoporous polymers, silica glass, chalcogenide glasses, inorganic single crystals, natural polymers, stimuli-responsive materials, and polymer composites. Next, we review manual and automated processes achieving dissimilar material properties in a single 3D structure by sequentially photo-exposing multiple photoresists as 3D analogs of 2D multicolor printing. Instructive examples from biology, optics, mechanics, and electronics are discussed. An emerging approach – without counterpart in 2D graphical printing – prints 3D structures combining dissimilar material properties in one 3D structure by using only a single photoresist. A controlled stimulus applied during the 3D printing process defines and determines material properties on the voxel level. Change of laser power and/or wavelength, or application of quasi-static electric fields allow for the seamless manipulation of desired materials properties.

3D printing enabled by light and enabling the manipulation of light: feature issue introduction

This feature issue aims at highlighting the two-way connection between optics and photonics and 3D printing. One direction concerns novel photoresist materials and technical advances in optics-based 3D additive manufacturing. The other direction uses such advanced optical 3D printing technologies for the realization of novel micro-optical components, micro-optical systems, 3D artificial materials called metamaterials, micro-robots, and more. All of these would be difficult if not impossible to manufacture otherwise.

3D printing enabled by light and enabling the manipulation of light: feature issue introduction

This feature issue aims at highlighting the two-way connection between optics and photonics and 3D printing. One direction concerns novel photoresist materials and technical advances in optics-based 3D additive manufacturing. The other direction uses such advanced optical 3D printing technologies for the realization of novel micro-optical components, micro-optical systems, 3D artificial materials called metamaterials, micro-robots, and more. All of these would be difficult if not impossible to manufacture otherwise.

Fabrication of GaAs micro-optical components using wet etching assisted femtosecond laser ablation

Femtosecond laser ablation is a flexible method for manufacturing gallium arsenide (GaAs) micro-optical components. However, its machining efficiency and surface quality do not satisfy industry requirements. Wet etching assisted femtosecond laser ablation is proposed to solve these problems. After corrosion, protrusions and particles are selectively corroded. X-ray diffraction and energy dispersive X-ray spectroscopy results show that oxides are formed after laser ablation, and the crystal cell size of GaAs increases. Thus the contact area between hydrofluoric acid atoms and the GaAs crystal cell increases, the ratio of modified-to-unmodified corrosion rate is as high as 10:1. A one-dimensional grating, a conventional Fresnel zone plate (FZP), and a fractal FZP are fabricated using this method. Experiments show that the GaAs micro-optical component can diffract and focus infrared light with a wavelength of 1.5 µm well. The process offers a way to achieve high efficiency and quality manufacturing of GaAs microstructures.

3D printed fiber sockets for plug and play micro-optics

Integrating micro-optical components at the end facet of an optical fiber enables compact optics to shape the output beam (e.g. collimating, focusing, and coupling to free space elements or photonic integrated circuits). However, the scalability of this approach is a longstanding challenge as these components must be aligned onto individual fiber facets. In this paper, we propose a socket that enables easy slotting of fibers, self-alignment, and coupling onto micro-optical components. This integrated socket can be detached from the substrate upon fiber insertion to create a stand-alone optical system. Fabrication is done using nanoscale 3D printing via two-photon polymerization lithography onto glass substrates, which allows multiple sockets to be patterned in a single print. We investigated variations in socket design and evaluated the performance of optical elements for telecom wavelengths. We obtained an alignment accuracy of ∼3.5 µm. These socket designs can be customized for high efficiency chip to fiber coupling and extended to other spectral ranges for free-form optics.

Tunable microlens array fabricated by a silicone oil-induced swelled polydimethylsiloxane (PDMS) membrane bonded to a micro-milled microfluidic chip.

Microlens arrays (MLAs) nowadays are critical micro-optical components and they can be applied in many application fields, such as optical communication systems and flat panel display modules. This article describes a novel approach to the fabrication of tunable, highly reliable, and uniform polydimethylsiloxane (PDMS) MLAs. A polydimethylsiloxane (PDMS) membrane is bonded to a micro-milled poly(methyl methacrylate) (PMMA) microfluidic chip and exposed to silicone oil of a specific viscosity. Molecules in the oil insert themselves into the molecular structure of the PDMS membrane, causing it to swell and subsequently form dome-shaped MLAs. From our experiments, we derived the following conclusions. First, the homogeneous swelling of the PDMS resulted in MLAs with a high numerical aperture (0.5), high uniformity illumination (CV of the illumination intensity is between 2.5%∼5.1%), and high uniformity (CV of sag height of MLAs is less than 0.05). Second, the shorter molecular chains in low-viscosity oils diffused more readily into the PDMS membrane, which increased the effects on swelling, resulting in MLAs with higher sag height and higher numerical aperture. For example, the 5 cst silicone oil resulted in sag height of 191 µm with NA of 0.50, whereas the 100 cst silicone oil resulted in sag height of 86 µm with numerical aperture of 0.33. Finally, the integrated mixer module enabled the simultaneous tuning of the 7 × 7 MLAs simply by adjusting the injection flow rates of the constituent silicone oils.

Wavelength-Tuning Common-Path Digital Holographic Microscopy for Quantitative Phase Imaging of Functional Micro-Optics Components

This study proposes a novel wavelength-tuning common-path digital holographic microscopy technique for quantitative phase imaging of functional micro-optics components. The proposed technique is immune to vibration and can reduce system error. In the proposed configuration, a parallel glass plate was inserted into the light path to create two identical test beams, which passed through a specially designed window filter. In this process, one beam serves as the object beam, while the other is diffracted to produce an ideal spherical wave front (the reference beam). A wavelength tunable laser was used as the light source to generate phase-shifting digital holograms. Structural information for the functional micro-optics components was then extracted using a classical four-step phase-shift algorithm. The viability of the proposed technique was assessed by measuring a micro-optics array.

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes.

Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economical way remains a huge challenge. In this paper, a 3D close-packed hexagonal microlens array (MLA) possessing over 6000 convex hexagonal micro-lenslets with the size of tens of micrometers within a footprint of 10 mm × 10 mm on a Ge20Sb15Se65 ChG surface was successfully fabricated via a precise thermal-mechanical molding process. The master mold of ChG MLA was firstly fabricated by a femtosecond laser-assisted chemical etching process and then transferred on to the surface of the ChG via a precision thermo-mechanical molding process, which resulted in a convex MLA. The morphology, imaging and focusing performances of the as-prepared ChG MLA were investigated and demonstrated the advancement of the method. Meanwhile, the IR transmittance and x-ray diffraction image of the ChG MLAs were measured to verify the structural and compositional stability of the ChG under the given molding conditions. The combined results proved a new route to mass production of miniaturized gapless ChG MLAs for advanced infrared micro-optics.

Hybrid refractive-diffractive axicons for Bessel-beam multiplexing and resolution improvement.

Optical elements rely on refraction, diffraction, or reflection for light manipulation. Fusing diffractive and refractive functions in a single element provides an extra layer of control over the wave propagation, allowing complex beam shaping through self-aligned, monolithic and miniaturized optics. Using gray-scale lithography with high-current focused Xe ion-beams, we realized hybrid refractive-diffractive micro-axicons that feature diffractive gratings engraved on their conical surfaces. Furthermore, we fabricated these devices in lithium niobate, which is a challenging piezo/optoelectronic material for processing with an as-yet unexploited potential in optical applications. The curvilinear surfaces of fabricated micro-axicons with a 230-µm diameter were engraved with diffraction linear and circular gratings of various depths (<400 nm), and the optical performance of these components was characterized, showing excellent agreement with theoretical expectations. The fusing of diffractive elements with carrier refractive surfaces introduces additional or enhanced device functionalities, such as beam multiplexing and resolution improvement. The potential applications of such monolithic and miniaturized hybrid micro-optical components include beamshaping for fluorescence microscopy.

"Optical tentacle" of suspended polymer micro-rings on a multicore fiber facet for vapor sensing.

We designed a new type of gas sensor, an optical tentacle, made of highly integrated polymer micro-ring resonators in three-dimensional space on the tiny end-facet of a multicore optical fiber. Two pairs of three polymer micro-ring resonators were hung symmetrically on both sides of three suspended micro-waveguides as the sensing units. The micro-waveguides interlace to form a three-layer nested configuration, which makes the multicore optical fiber a "tentacle" for vapors of volatile organic compounds. Both experiments and theoretical simulation confirmed that the symmetrical coupling of multiple pairs of rings with the micro-waveguide had better resonance than the single ring setup. This is because the symmetrical light modes in the waveguides couple with the rings separately. All the optical micro-components were fabricated by the two-photon lithography technology on the end facet of multicore optical fiber. The optical tentacle shows good sensitivity and reversibility. This approach can also be adopted for sensor array design on a chip. Furthermore, optical sensors that can sense vapors with multiple constituents may be achieved in the future by adding selective sensitive materials to or on the surface of the rings.

Convex silica microlens arrays via femtosecond laser writing.

We report fabrication of silica convex microlens arrays with controlled shape, size, and curvature by femtosecond laser direct writing. A backside etching in dye solution was utilized for laser machining high-fidelity control of material removal and real-time surface cleaning from ablation debris. Thermal annealing was applied to reduce surface roughness to 3 nm (rms). The good optical performance of the arrays was confirmed by focusing and imaging tests. Complex 3D micro-optical elements over a footprint of $ 100 \times 100\;\unicode{x00B5}{{\rm m}^2} $100×100µm2 were ablated within 1 h (required for practical applications). A material removal speed of $ 120\;\unicode{x00B5}{{\rm m}^3}/{\rm s} $120µm3/s ($ 6 \times {10^5} \;{{\rm nm}^3}/{\rm pulse} $6×105nm3/pulse) was used, which is more than an order of magnitude higher compared to backside etching using a mask projection method. The method is applicable for fabrication of micro-optical components on transparent hard materials.

Compact micro-optic based components for hollow core fibers.

Using micro-optic collimator technology, we present compact, low-loss optical interconnection devices for hollow core fibers (HCFs). This approach is one of the key manufacturing platforms for commercially available fiber optic components and most forms of HCFs can readily be incorporated into this platform without the need for any substantial or complicated adaptation or physical deformation of the fiber structure. Furthermore, this technique can provide for very low Fresnel reflection interconnection between solid-core fiber and HCF and in addition provides a hermetic seal for HCFs, which can be a critical issue for many HCF applications. In this paper, several exemplar HCF components are fabricated with low insertion loss (0.5-2 dB), low Fresnel reflection (-45 dB) and high modal purity (>20 dB) using various state-of-the-art HCFs.

Autocompensating Measurement-Device-Independent quantum cryptography in few-mode optical fibers

We present an autocompensating quantum cryptography technique for Measurement-Device-Independent quantum cryptography devices with different kind of optical fiber modes. We center our study on collinear spatial modes in few-mode optical fibers by using both fiber and micro-optical components. We also indicate how the obtained results can be easily extended to polarization modes in monomode optical fibers and spatial codirectional modes in multicore optical fibers.

Optical damage thresholds of microstructures made by laser three-dimensional nanolithography

Direct laser writing based on non-linear three-dimensional nanolithography (also known as 3D laser lithography, 3DLL) is a powerful technology to manufacture polymeric micro-optical components. However, practical applications of these elements are limited due to the lack of knowledge about their optical resilience and durability. In this Letter, we employ 3DLL for the fabrication of bulk (i.e., fully filled) and woodpile structures out of different photopolymers. We then characterize them using the S-on-1 laser-induced damage threshold (LIDT) measurements. In this way, quantitative data of LIDT values can be collected. Furthermore, this method permits to gather damage morphologies. The results presented demonstrate that LIDT values depend on the material and the geometry of the structure. Bulk non-photosensitized hybrid organic/inorganic photopolymer SZ2080 structures are found to be the most resilient with a damage threshold being 169 ± 15 m J / c m 2 .

Single crystal diamond blazed diffraction gratings and Fresnel microlens arrays with improved optical performance by high-resolution 3D laser lithography and pattern transfer by dry etching

We present a method to fabricate high precision 3D micro-optical components in single crystal diamond, and we demonstrate and experimentally characterize Fresnel microlens arrays and blazed diffraction gratings. The fabrication process is based on high-resolution 3D dip-in laser lithography and pattern transfer by chlorine-based reactive ion etching with a low diamond:photoresist selectivity (1:15) to obtain smooth etched surfaces with Ra < 2 nm. The fabricated microlenses have a focal length that deviates by 4% from the target value, while the blazed diffraction gratings have a maximum relative efficiency of 66% in the first order.

Femtosecond laser additive and subtractive micro-processing: enabling a high-channel-density silica interposer for multicore fibre to silicon-photonic packaging

Great strides have been made over the past decade to establish femtosecond lasers in advanced manufacturing systems for enabling new forms of non-contact processing of transparent materials. Research advances have shown that a myriad of additive and subtractive techniques is now possible for flexible 2D and 3D structuring of such materials with micro- and nano-scale precision. In this paper, these techniques have been refined and scaled up to demonstrate the potential for 3D writing of high-density optical packaging components, specifically addressing the major bottleneck for efficiently connecting optical fibres to silicon photonic (SiP) processors for use in telecom and data centres. An 84-channel fused silica interposer was introduced for high-density edge coupling of multicore fibres (MCFs) to a SiP chip. Femtosecond laser irradiation followed by chemical etching was further harnessed to open alignment sockets, permitting rapid assembly with precise locking of MCF positions for efficient coupling to laser written optical waveguides in the interposer. A 3D waveguide fanout design provided an attractive balancing of low losses, mode-matching, high channel density, compact footprint, and low crosstalk. The 3D additive and subtractive processes thus demonstrated the potential for higher scale integration and rapid photonic assembly and packaging of micro-optic components for telecom interconnects, with possible broader applications in integrated biophotonic chips or micro-displays.

Optical resonator formed with etched silicon micromirrors

The applications for optical resonators are manifold, ranging from laser resonators and filters to optical sensors based on resonators, such as optical gyroscopes. A concept of a miniaturized optical gyroscope has been developed. To realize a gyroscope of this sort, the assembly and precision alignment of the optical microcomponents to form a triangular cavity is crucial. In order to detect the rotation rate, the laser beam must circulate many times and not leave the resonator due to small misalignments. Therefore, the assembly of a miniaturized passive free space triangular ring resonator, in which the light can circulate by reflections by three mirrors, is investigated. To utilize the inherent alignments of crystal planes, two of the mirrors are realized by micromanufacturing within the same silicon crystal using wet etching, resulting in very perfect {111} facets. To further increase the reflectivity of the mirrors, different kinds of coatings are tested. With these two perfectly aligned mirrors, the resonator assembly challenge reduces to a three-degree of freedom alignment of a third mirror, in which a well-designed adjustable spacer is developed. Resonances with the etched {111} micromirrors in a linear cavity setup as well as in a triangular ring cavity setup have already been demonstrated.

Microfabrication of axicons by glass blowing at a wafer-level.

This Letter reports on the generation of glass-based axicons realized at the wafer level by means of microfabrication. The technique is based on micro glass blowing allowing parallel fabrication of numerous components at a time. Blowing is achieved due to cavities containing a gas that expands when the wafer stack is introduced in a furnace. Such cavities, generated in a silicon wafer and sealed by a bonded glass wafer, act as pistons pushing locally the other side of the glass wafer where the micro-optical component profile emerges. After cavities' removal by polishing, it is shown that such a component produces nondiffracting Bessel beams.

Micro-optical Components for Bioimaging on Tissues, Cells and Subcellular Structures.

Bioimaging generally indicates imaging techniques that acquire biological information from living forms. Among different imaging techniques, optical microscopy plays a predominant role in observing tissues, cells and biomolecules. Along with the fast development of microtechnology, developing miniaturized and integrated optical imaging systems has become essential to provide new imaging solutions for point-of-care applications. In this review, we will introduce the basic micro-optical components and their fabrication technologies first, and further emphasize the development of integrated optical systems for in vitro and in vivo bioimaging, respectively. We will conclude by giving our perspectives on micro-optical components for bioimaging applications in the near future.

Fabrication of large-area cylindrical microlens array based on electric-field-driven jet printing

The cylindrical microlens array (CMLA) is an important micro-optical component, it has very significant application effects in the fields of naked eye three-dimensional display, laser line generation, and deformed beam shaping. However, the high efficiency and low-cost manufacturing of large-area CMLA is still challenging for industry and academia. Based on the electric-field-driven (EFD) jet printing technique, a new method for manufacturing a large-area CMLA with high efficiency and low cost has been proposed. We use the theoretical analysis and numerical simulation to investigate the basic principle of EFD jet printing. The influence of process parameters on the formation of CMLA was revealed by experiments. Using optimized process parameters, the fabrication of a CMLA with a patterned area of 50 × 50 mm2, a line width of 70 μm, and a period of 100 μm was achieved. The geometric and optical properties of the fabricated CMLA were characterized, showing that the products have the good geometric appearance and focusing effect. The results show that the proposed fabrication method provides a new manufacturing process for large-area manufacturing of CMLA with high efficiency and low cost.