Optical Metrology Methods Research Articles

R3-DICnet: an end-to-end recursive residual refinement DIC network for larger deformation measurement.

Digital image correlation (DIC) is an optical metrology method for measuring object deformation and has been widely used in many fields. Recently, the deep learning based DIC methods have achieved good performance, especially for small and complex deformation measurements. However, the existing deep learning based DIC methods with limited measurement range cannot satisfy the needs of real-world scenarios. To tackle this problem, a recursive iterative residual refinement DIC network (R3-DICnet) is proposed in this paper, which mimics the idea of the traditional method of two-step method, where initial value estimation is performed on deep features and then iterative refinement is performed on shallow features based on the initial value, so that both small and large deformations can be accurately measured. R3-DICnet not only has high accuracy and efficiency, but also strong generalization ability. Synthetic image experiments show that the proposed R3-DICnet is suitable for both small and large deformation measurements, and it has absolute advantages in complex deformation measurement. The accuracy and generalization ability of the R3-DICnet for practical measurement experiments were also verified by uniaxial tensile and wedge splitting tests.

Fringe-pattern analysis with ensemble deep learning

In recent years, there has been tremendous progress in the development of deep-learning-based approaches for optical metrology, which introduce various deep neural networks (DNNs) for many optical metrology tasks, such as fringe analysis, phase unwrapping, and digital image correlation. However, since different DNN models have their own strengths and limitations, it is difficult for a single DNN to make reliable predictions under all possible scenarios. In this work, we introduce ensemble learning into optical metrology, which combines the predictions of multiple DNNs to significantly enhance the accuracy and reduce the generalization error for the task of fringe-pattern analysis. First, several state-of-the-art base models of different architectures are selected. A K-fold average ensemble strategy is developed to train each base model multiple times with different data and calculate the mean prediction within each base model. Next, an adaptive ensemble strategy is presented to further combine the base models by building an extra DNN to fuse the features extracted from these mean predictions in an adaptive and fully automatic way. Experimental results demonstrate that ensemble learning could attain superior performance over state-of-the-art solutions, including both classic and conventional single-DNN-based methods. Our work suggests that by resorting to collective wisdom, ensemble learning offers a simple and effective solution for overcoming generalization challenges and boosts the performance of data-driven optical metrology methods.

Neutron phase contrast imaging of PbWO4 crystals for G experiment test masses using a Talbot-Lau neutron interferometer

The use of transparent test/source masses can benefit future measurements of Newton’s gravitational constant G. Such transparent test mass materials can enable nondestructive, quantitative internal density gradient measurements using optical interferometry and allow in-situ optical metrology methods to be realized for the critical distance measurements often needed in a G apparatus. To confirm the sensitivity of such optical interferometry measurements to internal density gradients it is desirable to conduct a check with a totally independent technique. We present an upper bound on possible internal density gradients in lead tungstate (PbWO4) crystals using a Talbot-Lau neutron interferometer on the Cold Neutron Imaging Facility at NIST. We placed an upper bound on a fractional atomic density gradient in two PbWO4 test crystals of cm−1. This value is about two orders of magnitude smaller than required for G measurements. We discuss the implications of this result and of other nondestructive methods for characterization of internal density inhomogeneties which can be applied to test masses in G experiments.

Integrating Optical Wireless Communication Into an Optical Bifocal Metrology for Aerospace

Recently an innovative bifocal optical metrology method was proposed for space applications (e.g., rendez-vous and docking), based on unmodulated white LEDs. Here we design, realize, and test a solution that upgrades the metrology to include a digital communication feature, with no modification of the optical elements of the original system: indeed, the scheme exploits the same optical sources that are needed for metrology, which are now also working as optical antennas as their intensity is now modulated. At the receiver side, the conventional camera is now sided by a common photodiode. The system provides unidirectional data communication at 10 kbit/s speed. It is designed to support manoeuvres up to 400 m distance. The lab tests confirm the effectiveness of the proposed solutions, showing correct data transfer without any noticeable degradation of the metrology system.

Imaging of PbWO4 crystals for G experiment test masses using a laser interferometer

It is highly desirable for future measurements of Newton’s gravitational constant G to use test/source masses that allow nondestructive, quantitative internal density gradient measurements. High density optically transparent materials are ideally suited for this purpose since their density gradient can be measured with laser interferometry, and they allow in-situ optical metrology methods for the critical distance measurements often needed in a G apparatus. We present an upper bound on possible internal density gradients in lead tungstate (PbWO4) crystals determined using a laser interferometer. We placed an upper bound on the fractional atomic density gradient in two PbWO4 test crystals of cm−1. This value is more than two orders of magnitude smaller than what is required for G measurements. They are also consistent with but more sensitive than a recently reported measurements of the same samples, using neutron interferometry. These results indicate that PbWO4 crystals are well suited to be used as test masses in G experiments. Future measurements of internal density gradients of test masses used for measurements of G can now be conducted non-destructively for a wide range of possible test masses.

Hybrid optical measurement technique for detection of defects in epitaxially grown 4H-SiC layers

Recent developments in power electronics require the use of new wide bandgap compound semiconductor. We demonstrate the use of the ellipsometry and white light interference microscopy to detect defects in epitaxially grown SiC layers on SiC substrates. Such hybrid optical metrology methods can be used to better understand the mechanism of the development of the defects as well as their effects on the material´s optoelectronic properties.

Towards self-calibrated lens metrology by differentiable refractive deflectometry.

Deflectometry, as a non-contact, fully optical metrology method, is difficult to apply to refractive elements due to multi-surface entanglement and precise pose alignment. Here, we present a computational self-calibration approach to measure parametric lenses using dual-camera refractive deflectometry, achieved by an accurate, differentiable, and efficient ray tracing framework for modeling the metrology setup, based on which damped least squares is utilized to estimate unknown lens shape and pose parameters. We successfully demonstrate both synthetic and experimental results on singlet lens surface curvature and asphere-freeform metrology in a transmissive setting.

Sub-pixel displacement measurement based on the combination of a gray wolf optimizer and gradient algorithm.

The digital speckle correlation method (DSCM) aims to measure the displacement of the interesting points by matching the subset around the same point between the undeformed image and the deformed image. It is an effective and powerful optical metrology method for deformation measurement. Considering that the gray wolf optimizer (GWO) is one of the most popular metaheuristic algorithms to calculate the unknown search spaces in the field of optical engineering, a sub-pixel displacement measurement technique based on the GWO and gradient algorithm is proposed. First, the zero-mean normalized cross correlation function is applied to analyze the correlation between the reference image and deformed image subsets. Second, by exploiting the global searching ability of the GWO algorithm, the initial integer pixel value is obtained and further viewed as the initialization displacement. Finally, the final sub-pixel displacement is generated by using a Barron gradient algorithm. Compared with the state-of-the-art methods on synthetic speckle images, the proposed method can effectively measure the displacement and deformation of rigid bodies. Furthermore, the experiments on the real images demonstrate the effectiveness of our presented framework.

Fast scatterometric measurement of periodic surface structures in plasma-etching processes

To satisfy the continuous demand of ever smaller feature sizes, plasma etching technologies in microelectronics enable the fabrication of device structures in the nanometer range. To control these processes, real-time access to the structure’s dimensions is needed. We develop a special method of optical critical dimension metrology and evaluate the feasibility of reconstructing the etched dimensions from experimental reflectivity spectra of the surface, taken about every second. For a periodic 2D model structure etched into a silicon, we develop and test a fast algorithm.To reduce the computing time, we generate a library of spectra before the etching. We demonstrate that, by replacing the numerically simulated spectra in the reconstruction algorithm by spectra interpolated from the library, it is possible to compute the geometry parameters in times less than a second. Finally, to also reduce memory size and computing time for the library, we reduce the scanning of the parameter values to a sparse grid.

Motion-free TSOM using a deformable mirror.

Through-focus scanning optical microscopy (TSOM) is a model-based optical metrology method that involves the scanning of a target through the focus of an optical microscope. Unlike a conventional optical microscope that directly extracts the diffraction-limited optical information from a single in-focus image, the TSOM method extracts nanometer scale sensitive information by matching the target TSOM data/image to reference TSOM data/images that are either experimentally or computationally collected. Therefore, the sensitivity and accuracy of the TSOM method strongly depends on the similarities between the conditions in which the target and reference TSOM images are taken or simulated, especially the lateral instability during through-focus scanning. As a remedy to the lateral instability, we proposed the application of adaptive optics to the through-focus scanning operation and initially developed a closed-loop system with a tip/tilt mirror and a Shack-Hartmann sensor, with which we were able to keep the plane position within peak-to-valley (PV) 33 nm. We then further developed a motion-free TSOM tool reducing the instability down to practically zero by the replacement of the tip/tilt mirror with a deformable mirror that performs through-focus scanning by deforming its mirror surface. The motion-free TSOM tool with a × 50 (NA 0.55) objective lens could provide a scanning range of up to ± 25 µm with a minimum step of 25 nm at a maximum update rate of 4 kHz. The tool was demonstrated to have a recognition accuracy of < 4 nm for critical dimension (CD) values in the range of 60 ∼ 120 nm with a reference TSOM image library generated by a Fourier modal method matching various observations conditions.

Spatial DIC Errors due to Pattern-Induced Bias and Grey Level Discretization

Digital image correlation (DIC) is an optical metrology method widely used in experimental mechanics for full-field shape, displacement and strain measurements. The required strain resolution for engineering applications of interest mandates DIC to have a high image displacement matching accuracy, on the order of 1/100th of a pixel, which necessitates an understanding of DIC errors. In this paper, we examine two spatial bias terms that have been almost completely overlooked. They cause a persistent offset in the matching of image intensities and thus corrupt DIC results. We name them pattern-induced bias (PIB), and intensity discretization bias (IDB). We show that the PIB error occurs in the presence of an undermatched shape function and is primarily dictated by the underlying intensity pattern for a fixed displacement field and DIC settings. The IDB error is due to the quantization of the gray level intensity values in the digital camera. In this paper we demonstrate these errors and quantify their magnitudes both experimentally and with synthetic images.

Experimental investigation of the multiscale mechanical behavior of knitted textiles

The nonlinear, anisotropic, and multiscale mechanical behavior of knitted textiles is investigated experimentally in this article. The approach is motivated by recent computational work by the authors that revealed, for the first time to their best knowledge, local-global mechanical behavior effects related to the hierarchical, three-dimensional structure of this type of materials. The investigation is carried out on single jersey knitted textile specimens. Mechanical testing consisting of tensile loading along the two principal directions was coupled with a noncontact, optical metrology method capable of providing deformation measurements. The effect of globally applied loading on yarn-to-yarn interactions was explored using measured data. The results validate the previously obtained computational findings that include the anisotropic behavior between course and wale directions, the pronounced out-of-plane motion observed when in-plane loading is applied, as well as the characteristic nonlinear mechanical behavior of knitted textiles. These effects were linked to direct observations of the loop structure that demonstrated the coupling between local kinematics and kinetics with global mechanical behavior.

Reconstruction of Optical Pulse Intensity and Phase Based on SPM Spectra Measurements in Microstructured Tellurite Fiber in Telecommunication Range

We report novel functionalities of a very simple, robust, and low-cost optical metrology method for the reconstruction of an intensity profile and phase of pulses in the telecommunication range based on measuring the fundamental spectrum and two self-phase modulated spectra after a nonlinear element with Kerr nonlinearity. We demonstrate, for the first time, to the best of our knowledge, the possibility of implementing this method using a microstructured tellurite fiber (with a zero dispersion wavelength of 1.55 μ m and nonlinear coefficient >500 (W km)−1) as a nonlinear element for characterizing optical pulses with a wide range of parameters: wavelengths from O-band to L-band, durations from <100 fs to ∼100 ps, low energies (∼100 pJ), and/or low peak powers (∼1 W). The intensity and phase of 80-fs ultrashort pulses with an energy of ∼100 pJ are retrieved experimentally. We give a detailed theoretical analysis of the possibilities of reconstructing telecommunication pulses, including the important problem of measuring two coherent neighboring pulses whose wings may overlap.

Full-field wrist pulse signal acquisition and analysis by 3D Digital Image Correlation

Pulse diagnosis is an essential part in four basic diagnostic methods (inspection, listening, inquiring and palpation) in traditional Chinese medicine, which depends on longtime training and rich experience, so computerized pulse acquisition has been proposed and studied to ensure the objectivity. To imitate the process that doctors using three fingertips with different pressures to feel fluctuations in certain areas containing three acupoints, we established a five dimensional pulse signal acquisition system adopting a non-contacting optical metrology method, 3D digital image correlation, to record the full-field displacements of skin fluctuations under different pressures. The system realizes real-time full-field vibration mode observation with 10FPS. The maximum sample frequency is 472Hz for detailed post-processing. After acquisition, the signals are analyzed according to the amplitude, pressure, and pulse wave velocity. The proposed system provides a novel optical approach for digitalizing pulse diagnosis and massive pulse signal data acquisition for various types of patients.

In situ CTE measurements and damage detection using optical metrology

This paper presents a methodology to make coefficient of thermal expansion measurements through the combined use of two non-contact and full field optical metrology methods including digital image correlation and infrared thermography. In this context, active Infrared Thermography techniques combined with contact and non-contact deformation measurement methods have already been reported to measure materials’ thermal expansion. In addition, such techniques have been reported to be capable to detect surface and subsurface defects from changes in homogenous heat diffusion due to damage. Based on this knowledge, it is hypothesized in this article that the material response induced by thermal loading and quantified by coefficient of thermal expansion measurements could be further used as an indicator of damage. To validate the hypothesis three measurements were performed. The first established the effectiveness of using deformation and thermal full field data for coefficient of thermal expansion measurements. The second intended to demonstrate the advantage of using such full field data in order to provide site-specific measurements of thermal expansion. Finally damage was a priori induced to a metallic specimen, and the measured variations of local CTE confirmed the potential of using the described approach as a means of damage quantification in materials and structures.

Axial-Stereo 3-D Optical Metrology for Inner Profile of Pipes Using a Scanning Laser Endoscope

As the rapid progress in the development of optoelectronic components and computational power, 3-D optical metrology becomes more and more popular in manufacturing and quality control due to its flexibility and high speed. However, most of the optical metrology methods are limited to external surfaces. This article proposed a new approach to measure tiny internal 3-D surfaces with a scanning fiber endoscope and axial-stereo vision algorithm. A dense, accurate point cloud of internally machined threads was generated to compare with its corresponding X-ray 3-D data as ground truth, and the quantification was analyzed by Iterative Closest Points algorithm.

Optical 3D Metrology for Optimization of Sheet Metal Forming Processes

3D optical metrology methods are increasingly used in the research of sheet metal materials and in sheet metal production processes. Optical measuring systems are implemented in different process stages, including design, sheet metal material research and component development, tool making and production as well as series accompanying quality control.Today’s development processes are initially driven from computational methods. Especially for the development of sheet metal components the numerical forming simulation is an important tool. However, performing a reliable forming simulation requires accurate input parameters like 3D geometry data for meshing, material parameters and boundary conditions which can be obtained with optical measuring systems. Further on the validation of these numerical simulations is supported with optical full-field sheet metal forming analysis.In the tool manufacturing phase 3D measurement data contributes in reducing the time frame for CNC machining processes, for the try-out phase, future tool reproduction as well as for repair and maintenance.With automated 3D measuring solutions series accompanying quality control is performed to determine tool wear and to shorten the response time if problems in the production occur.This paper is extending past work [1] and discusses today’s contribution of optical 3D measuring techniques in sheet metal component development and production, covering the areas of determining input parameters for sheet metal forming simulations and its validation, tool manufacturing, including the try-out, and production quality control using automated optical measurement machines.

Digital carrier superposition by Hilbert–Huang transform for optical phase recovery in speckle shearing interferometry

Industrial production constraints often require technical tests and controls. Optical metrology methods allow a non destructive test of wide range of parameters, such as defects and displacements, with very good accuracy. The phase retrieval is an effective way that allows three-dimensional profile reconstruction from intensity shearograms. This research work focuses on the extraction of the phase from one uncarrier shearogram using the Hilbert–Huang transform. An algorithm for the phase calculation based on the bidimensional empirical mode decomposition, Hilbert transform (HT), and Fourier transform (FT) is presented. A spatial digital carrier has been superimposed before the application of the FT or HT which uses two π2 shifted shearograms, to get access to the phase map via a global analysis of intensity images. An evaluation was made through a numerical simulation to validate and confirm the performance of the proposed algorithm. The main advantage of this technique is its ability to provide a metrological solution for fast dynamic analysis.

Special Section Guest Editorial: High-Speed 3-D Optical Metrology and Applications

Recent innovations in computational and electronic technologies have drastically enhanced the three-dimensional (3-D) optical metrology field in terms of measuring speed and accuracy, as well as expanded applications. High-speed 3-D optical metrology is a platform technology that could benefit numerous scientific studies and engineering concerns including but not limited to manufacturing, medical sciences, robotics, etc. Lately, a number of novel high-speed 3-D optical metrology methods have been developed, and these technologies have been applied to fields ranging from medicine, computer science, robotics, biometrics, homeland security, agriculture, and biology, to automotive, manufacturing, and entertainment industries. For example, Microsoft Kinect has penetrated 3-D optical metrology into our daily lives; real-time 3-D metrology techniques have permitted in situ inspection in the electronics industry; and high-speed 3-D sensing devices have enabled better robotic navigation. This special section assembles a good number of highspeed 3-D optical metrology technologies, as well as a few representative applications. Active high-speed 3-D shape measurement based on fringe projection requires generating

Pixel-level robust digital image correlation

Digital Image Correlation (DIC) is a well-established non-contact optical metrology method. It employs digital image analysis to extract the full-field displacements and strains that occur in objects subjected to external stresses. Despite recent DIC progress, many problematic areas which greatly affect accuracy and that can seldomly be avoided, received very little attention. Problems posed by the presence of sharp displacement discontinuities, reflections, object borders or edges can be linked to the analysed object's properties and deformation. Other problematic areas, such as image noise, localized reflections or shadows are related more to the image acquisition process. This paper proposes a new subset-based pixel-level robust DIC method for in-plane displacement measurement which addresses all of these problems in a straightforward and unified approach, significantly improving DIC measurement accuracy compared to classic approaches. The proposed approach minimizes a robust energy functional which adaptively weighs pixel differences in the motion estimation process. The aim is to limit the negative influence of pixels that present erroneous or inconsistent motions by enforcing local motion consistency. The proposed method is compared to the classic Newton-Raphson DIC method in terms of displacement accuracy in three experiments. The first experiment is numerical and presents three combined problems: sharp displacement discontinuities, missing image information and image noise. The second experiment is a real experiment in which a plastic specimen is developing a lateral crack due to the application of uniaxial stress. The region around the crack presents both reflections that saturate the image intensity levels leading to missing image information, as well as sharp motion discontinuities due to the plastic film rupturing. The third experiment compares the proposed and classic DIC approaches with generic computer vision optical flow methods using images from the popular Middlebury optical flow evaluation dataset. Results in all experiments clearly show the proposed method's improved measurement accuracy with respect to the classic approach considering the challenging conditions. Furthermore, in image areas where the classic approach completely fails to recover motion due to severe image de-correlation, the proposed method provides reliable results.