This paper reports ultra fine plastic forming (nano forming) of hard brittle materials by indentation of diamond tools. Soda glass, firelite glass and quartz glass were examined by a nano indentation tester specially designed for this study. Two types of diamond tools were used for the experiment : one was a knife edge type tool and the other was a stamp type tool which was machined by a focused ion beam equipment. Indentation tests by the knife edge tool showed that glasses are available for ductile plastic deformation where no cracks are generated when indentation depth is smaller than their critical depth. Deformation characteristics of nano forming were found to be almost similar to macroscopic plastic work even on a hard brittle material. Indentation test of the stamp type tool succeeded in fabricating dot array structures on the glasses. Deformation of work material was however not uniform but depth of dots and density of cracks were distributed in a imprinted structure. Such distributions were explained by stress variation under the tool in imprinting.
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