We prepared CaTiO3 by solid state reactions as a model for Ti-based microwave dielectric ceramics to investigate the influence of thermal treatment on conductivity and microwave dielectric loss. The intrinsic defect concentrations of CaTiO3 may be modified by air-quenching, air-annealing and thermal treatment in various atmospheres such as O2, Ar and air. CaTiO3 has p-type conductance implying that calcium vacancy VCa× may be the dominant defect. The variation in defect concentration influences the low frequency conductivity but not the microwave dielectric loss. The VCa× concentration in the air-quenched sample was found to be lower than that in the air-annealed one. However, the former showed ∼8% deterioration and the latter showed a 14% improvement in the Q × f value. The data, therefore, suggests that other factors such as thermally induced strain rather than intrinsic defects may influence the microwave dielectric loss.