Lithium tantalite (LiTaO 3) thin films (∼0.5 μm) have been successfully deposited on Pt(111)/ SiO 2/ Si(1 0 0) substrates by means of sol–gel spin-coating technology. Figures of merit for infrared detector were studied for the LiTaO 3 thin films. There exists high figures of merit F v of 2.1×10 −10 C cm/J and F m of 2.4×10 −8 C cm/J because of the relative low dielectric constant ( ε r) of 35 and high pyroelectric coefficient ( γ) of 4.0×10 −8 C/cm 2 K of the films. The pyroelectric infrared detector fabricated by the LiTaO 3 thin film exhibits a voltage reponsivity R v of 4584 V/W at 20 Hz and a high specific detectivity D ∗ of 4.23×10 7 cm Hz 1/2/ W at 100 Hz .
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