Optical quality of glass components are determined by its surface finish either at lapping stage or at final polished stage. The criticality of optical components is defined by its application. For commercial application its surface finish can be of the order of few microns, whereas for special purpose applications such as aerospace, navigation and laser based sensors its surface finish requires super smooth polish ranging from angstrom to sub angstrom level. In order to achieve such high surface figure, the optical components has to be pre-processed from lapping stage. Two parameters play a major role for obtaining better quality of optical components; they are Surface Roughness (Ra) and Sub Surface Damage (SSD). These parameters have to be monitored from the initial stage of lapping. In this work, Fused Silica glass substrate has been considered and lapped with different deterministic grinding methods, such as Diamond Pellet, Diamond Trizact Tile and Diamond Cup Tools. The abrasives used are pre determined diamond particles embedded in different matrix, such as metal bound, resin bound, ceramic bound and electroplated. The processed samples were characterized for its Average Roughness (Ra) through White Light Interferometry technique and its corresponding depth of SSD was calculated. Images of processed samples were captured through Field Emission Scanning Electron Microscope (FESEM). Process optimization and comparative study between various deterministic lapping processes has been established. Average Surface Roughness (Ra) has been reduced from 274 nm to 3.3 nm and its corresponding depth of SSD values were also reduced from 14.5 µm to 0.151 µm. Earlier, studies determine that SSD depends on grit size of diamond whose relation was given by 0.5d, irrespective of processing parameter or methodology adopted. In this study results have been obtained with one order down with respect to earlier achieved results.