The microwave properties of microstrip lines used for Josephson voltage standard circuitsat frequencies from 70 to 75 GHz were investigated at a temperature of 4.2 K. Ourmeasurements quantify the different loss sources. The excitation of a parasitic substratemode is postulated, demonstrated by microwave modelling and confirmed byexperiments. These modes dominate the losses for wafers with a thickness above500 µm. The substrate modes can induce an inhomogeneous microwave distribution in theJosephson junction array, thereby causing poor operation of the voltage standard circuits.Silicon dioxide fabricated in various PECVD processes was used as the dielectric layer inthe microstrip line circuits. Permittivity and losses of silicon dioxide and thesilicon substrate were determined, as well as the surface resistance of niobium.
Read full abstract