Neutral beam injection (NBI) heating is a significant auxiliary heating method used in Tokamak fusion devices. The material of faraday shield (FS) and accelerator grids in the NBI inductively coupled plasma (ICP) source can be damaged during operation by the high-density hydrogen plasma irradiation, and thus affecting the stability of the NBI system. In this paper, a series of hydrogen plasma exposure experiments are performed on oxygen-free copper (OFC) specimens at 400 K–850 K with ion energy of 20–200 eV and irradiation fluence up to 1.0 × 1025 m−2. Meanwhile, the rate equation model is adopted for numerical simulation of the bubble growth and hydrogen retention. The influence of OFC surface temperature, hydrogen ion energy and fluence on OFC damage are experimentally and numerically investigated. Surface observations show that swell and exfoliation are formed on the OFC samples at 400 K and 600 K by scanning electron microscopy. The hydrogen ion energy varying from 20 to 200 eV at 400 K is observed to have little effect on OFC surface microstructure. The simulative results show that there exist different critical temperatures when the initial bubble radius changes. The bubble surface density rises and the bubble size decreases with increasing temperature (below the critical temperature). In addition, adjacent bubbles get closer to each other with the growth of hydrogen bubbles, and the strong tensile stress is produced inside the surrounding material of hydrogen bubbles. Some cracks caused by hydrogen bubbles appear on the surface of the OFC to relax the pressure-induced stress, ultimately leading to OFC FS/grids material damage. This investigation helps to understand hydrogen retention and failure mechanisms of OFC materials under extreme operation conditions in the NBI devices.