Recently, a more popular patterned surface acoustic wave (SAW) device with better performance was proposed. This structure has a large electromechanical coupling factor. To make surface acoustic wave devices easy to be applied to integrated circuit technology, a multilayer structure based on patterned Al/ZnO/Si is designed by using finite element method (FEM). Firstly, dependence of ZnO piezoelectric material on electromechanical coupling factor is studied systematically. The results show that Al/ZnO/Si structure excites Rayleigh mode and Sezawa mode with high electromechanical coupling factor. The patterning of piezoelectric materials could be achieved by etching. The electromechanical coupling factor of Rayleigh mode is as high as 7.98%, and the electromechanical coupling factor of Sezawa mode is up to 9.68%. As we all know, temperature will affect the characteristics of SAW devices. Therefore, the temperature characteristics based on this structure are systematically studied. To achieve zero temperature coupling coefficient, SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> is used as an intercalation layer for temperature compensation. The structure of Rayleigh mode and Sezawa mode with the thinner SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer is easier to achieve zero temperature coupling coefficient than that of conventional structure. Meanwhile, the electromechanical coupling factor of Sezawa mode based on patterned Al/ZnO/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si structure does not change significantly with the increase of SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> thickness, with the maximum value of 10.78%, and the minimum value of 10.62%, which is 1.1% larger than that of structure without SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> .
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