Glass Microchannel Research Articles

Multicolor Fluorescence Detection on an Electrophoretic Microdevice Using an Acoustooptic Tunable Filter

An acoustooptic tunable filter (AOTF) is used to detect multiple fluorescent signals on a fluidic microdevice. A confocal laser-induced fluorescence detection setup is used to excite fluorescent dyes in glass microchannels, presenting a streamlined and robust detection system consisting of the narrow-bandwidth AO filter and a single photodetector. The flexibility of the filter is demonstrated by alternating between wavelengths for precise microchannel alignment and sweeping through a range of wavelengths for preliminary spectral characterization of subnanoliter probe volumes of target analytes. The AOTF is also coupled with an electrophoretic separation for the multicolor detection of PCR-amplified DNA against a labeled sizing standard, the discrimination of multiple amplicons overlapped in time, and the identification of amplified biowarfare agents in a fluorescent spiking experiment. Finally, to demonstrate the multicolor capability of the system, 19-wavelength detection is performed during the separation of a three-dye sample mixture.

Visualization of convective boiling heat transfer in single microchannels with different shaped cross-sections

Convective boiling in transparent single microchannels with similar hydraulic diameters but different shaped cross-sections was visualized, along with simultaneous measurement of the local heat transfer coefficient. Two types of microchannels were tested: a circular Pyrex glass microtube (210 μm inner diameter) and a square Pyrex glass microchannel (214 μm hydraulic diameter). A 100-nm-thick semi-transparent ITO/Ag thin film sputtered on the outer wall of the microchannel was used for direct joule heating of the microchannel. The flow field visualization showed semi-periodic variation in the flow patterns in both the square and circular microchannels. Such variation was because the confined space limited the bubble growth in the radial direction. In the square microchannel, both the number of nucleation bubbles and the local heat transfer coefficient increased with decreasing vapor quality. The corners acted as active nucleation cavities, leading to the higher local heat transfer coefficient. In contrast, lack of cavities in the smooth glass circular microchannel yielded a relatively smaller heat transfer coefficient at lower vapor quality. Finally, the heat transfer coefficient was higher for the square microchannel because corners in the square microchannel acted as effective active nucleation sites.

Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching

We use the combination of femtosecond laser dielectric modification and selective chemical etching to fabricate high-quality microchannels in glass. The photoinduced modification morphology has been studied in fused silica and in borosilicate glass BK7, using ultra-high spatial resolution techniques of selective chemical etching followed by atomic force or scanning electron microscopy. The analysis shows that the high differential etch rate inside the modified regions, is determined by the presence of polarization-dependent self-ordered periodic nanocracks or nanoporous structures. We also investigate the optimum irradiation conditions needed to produce high-aspect ratio microchannels with small symmetric cross-sections and smooth walls.

Lattice Boltzmann Simulations of Droplet Formation in a T-Shaped Microchannel

We investigated the formation of a droplet from a single pore in a glass chip, which is a model system for droplet formation in membrane emulsification. Droplet formation was simulated with the lattice Boltzmann method, a method suitable for modeling on the mesoscale. We validated the lattice Boltzmann code with several benchmarks such as the flow profile in a rectangular channel, droplet deformation between two shearing plates, and a sessile drop on a plate with different wetting conditions. In all cases, the modeling results were in good agreement with the benchmark. A comparison of experimental droplet formation in a microchannel glass chip showed good quantitative agreement with the modeling results. With this code, droplet formation simulations with various interfacial tensions and various flow rates were performed. All resulting droplet sizes could be correlated quantitatively with the capillary number and the fluxes in the system.

Fabrication of Porous Nanostructured Thin Films For Microfluidic and Microarray Applications

ABSTRACTThe functionality of microfluidic and microassay devices could be enhanced through further development of porous engineered microstructures. New structural elements fabricated with porous nanostructured thin films deposited by the glancing angle deposition (GLAD) technique have been developed for these devices, and are reviewed here. With the GLAD technique, engineered structures such as vertical posts, slanted posts, helices, and square spirals can be directly grown inside microfluidic channels. A high surface area channel (517cm2/cm2) was made by depositing a silicon oxide porous film in glass microchannels (up to 4.5μm deep and 50μm wide). Similar channels were also fabricated by patterning channels in a photoresist-coated porous film. Self-sealed microchambers and channels were made by growing a SiO2 porous film on 14μm high silicon mesas (2.5×2.5μm, 7×7μm, and 25×25μm) and lines (2.5 to 50μm wide). Devices with channels containing periodic arrays of Si pillars with controllable porosity and architecture were fabricated with only one lithography and deposition cycle. The entire device was made by depositing a single GLAD porous film with areas of different porosity defining the channels. The channels, 200μm wide and 10.5μm deep, contained helical pillars with pore sizes ranging from 100nm-2μm, while a more dense nanofibrous helical film made up the remainder of the device. Fluid flow activated by negative pressure was demonstrated in this device, using both a dye solution and a 50nm microsphere solution. Material selection is not limited to silicon or silicon oxide, but may include a wide range of semiconductors, insulators and metals. A GLAD film was used to separate a test dye solution, demonstrating its potential for use in thin layer chromatography. The reported elements are suitable for a range of applications, including – but not limited to – chromatography, nano-assays and capillary electrophoresis.

オンチップ電気化学プロセスのための微小電極パターンのマイクロマシニング

In order to implement electrochemical processes (e.g., detection or synthesis) on a chip-based system, micromachining techniques for a glass microchip with fully integrated electrodes have been developed. Pt/Ti microelectrodes were successfully patterned on the curved surface of a glass microchannel, which was etched in a HF solution using polysilicon thin film as an etch mask, by means of a lift-off method using a positive thick photoresist. In this process, the photoresist must be exposed with a single wavelength (g line) selected from a high-pressure mercury lamp in order to obtain its microstructure with excellent edge quality and vertical sidewalls. In addition, although fusion bonding cannot be used for microchips with lead patterns in the interface between a pair of glass substrates, a glass cover plate can be bonded to a glass substrate with lead patterns embedded in the space formed on its surface by buffered HF (BHF) etching. The resulting bonded area ratio was estimated to be approximately the same as that for glass-to-glass bonding.

Low-Reynolds-number motion of a heavy sphere between two parallel plane walls

A novel boundary-integral algorithm [Staben, M.E., Zinchenko, A.Z., Davis, R.H., 2003. Motion of a particle between two parallel plane walls in low-Reynolds-number Poiseuille flow. Physics of Fluids 15, 1711–1733; Erratum: Phys. Fluids 16, 4206] is used to obtain O(1)-nonsingular terms that are combined with two-wall lubrication asymptotic terms to give resistance coefficients for near-contact or contact motion of a heavy sphere translating and rotating between two parallel plane walls in a Poiseuille flow. These resistance coefficients are used to describe the sphere's motion for two cases: a heavy sphere driven by a Poiseuille flow in a horizontal channel and a heavy sphere settling due to gravity through a quiescent fluid in an inclined channel. When the heavy sphere contacts a wall in either system, which occurs when the gap between the sphere and the wall becomes equal to the surface roughness of the sphere (or plane), a contact-force model using the two-wall resistance coefficients is employed. For a heavy sphere in a Poiseuille flow, experiments were performed using polystyrene particles with diameters 10%–60% of the channel depth, driven through a glass microchannel using a syringe pump. The measured translational velocities for these particles show good agreement with theoretical results. The predicted translational velocity increases for increasing particle diameter, as the spheres extend further into the Poiseuille flow, except for particles that are so large (diameters of 80%–85% of the channel depth) that the upper wall has a dominant influence on the particle velocity. For a heavy sphere settling in a quiescent fluid in an inclined channel, the transition from the no-slip regime to slipping motion occurs for a larger inclination angle of the channel with respect to the horizontal for an increase in particle diameter, since the larger particles are more slowed by the second wall. Limited experiments were performed for Teflon spheres with diameters 64%–95% of the channel depth settling in a very viscous fluid along the lower wall of an inclined acrylic channel. The measured translational velocities, which are only about 15%–25% of the tangential component of the undisturbed Stokes settling velocity, are in close agreement with theory using physical parameters obtained from similar experiments with a single wall [Galvin, K.P., Zhao, Y., Davis, R.H., 2001. Time-averaged hydrodynamic roughness of a noncolloidal sphere in low Reynolds number motion down an inclined plane. Physics of Fluids 13, 3108–3119].

Rapid inorganic ion analysis using quantitative microchip capillary electrophoresis

Rapid quantitative microchip capillary electrophoresis (CE) for online monitoring of drinking water enabling inorganic ion separation in less than 15 s is presented. Comparing cationic and anionic standards at different concentrations the analysis of cationic species resulted in non-linear calibration curves. We interpret this effect as a variation in the volume of the injected sample plug caused by changes of the electroosmotic flow (EOF) due to the strong interaction of bivalent cations with the glass surface. This explanation is supported by the observation of severe peak tailing. Conducting microchip CE analysis in a glass microchannel, optimized conditions are received for the cationic species K +, Na +, Ca 2+, Mg 2+ using a background electrolyte consisting of 30 mmol/L histidine and 2-( N-morpholino)ethanesulfonic acid, containing 0.5 mmol/L potassium chloride to reduce surface interaction and 4 mmol/L tartaric acid as a complexing agent resulting in a pH-value of 5.8. Applying reversed EOF co-migration for the anionic species Cl −, SO 4 2− and HCO 3 − optimized separation occurs in a background electrolyte consisting of 10 mmol/L 4-(2-hydroxyethyl)-1-piperazineethanesulfonic acid (HEPES) and 10 mmol/L HEPES sodium salt, containing 0.05 mmol/L CTAB (cetyltrimethylammonium bromide) resulting in a pH-value of 7.5. The detection limits are 20 μmol/L for the monovalent cationic and anionic species and 10 μmol/L for the divalent species. These values make the method very suitable for many applications including the analysis of abundant ions in tap water as demonstrated in this paper.

Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS

Autonomous MEMS require similarly miniaturized power sources. In this paper, we present the first working three-dimensional (3-D) rechargeable Li-ion thin-film microbattery technology that is compatible with MEMS requirements. The technology has been developed, and full 3-D cells have been manufactured on both glass and silicon substrates. Our 3-D microbatteries have a sandwich-like structure of conformal thin-film electrodes, electrolyte and current collectors. The films are deposited sequentially on all available surfaces of a perforated substrate (e.g., silicon or a glass microchannel plate or "MCP") using wet chemistry. The substrate has thousands of high-aspect ratio holes per square cm, thereby providing more than an order of magnitude increase in surface area per given footprint (original 2-D substrate area). The full 3-D cell consists of a Ni cathode current collector, a MoO/sub y/S/sub z/ cathode, a hybrid polymer electrolyte (HPE) and a lithiated graphite anode that also serves as anode current collector. One 3-D cell with a roughly 1-/spl mu/m-thick cathode ran at C/10 to 2C charge/discharge rates and room temperature for 200 cycles with 0.2% per cycle capacity loss and about 100% Faradaic efficiency. The cell exhibited a capacity of 2 mAh/cm/sup 2/, about 30times higher than the capacity of a similarly built planar (2-D) cell with the same footprint and same cathode thickness.

Glass microchannel technology for capillary electrophoresis

The fabrication process of glass chips for capillary electrophoresis by means of micromachining is reported. The device is made up of two glass substrates joined by means of thermal fusion bonding. Selective wet etchings were used to define five microchannels, four for samples injection and one for the separation, while the access holes were obtained with diamond drills. The fabrication process required only one photolithographic step and the thermal fusion bonding did not reduce the uniformity and integrity of the channels. Good results in terms of microchannels shape definition, repeatability and glass surface quality have been obtained.

Field-effect control of electro-osmotic flow in microfluidic networks

This paper describes microfluidic networks based on glass microchannels with integrated insulated gate electrodes that are used to modify the zeta-potential at specific locations on the wall surface of the microchannels. This modification is used to control direction and size of the electro-osmotic flow (EOF) in the microchannels. A new microfabrication process was developed that compared to earlier work in our institute [R.B.M. Schasfoort, S. Schlautmann, J. Hendrikse, A. van den Berg, Science 286 (1999) 942] leads to mechanically more robust structures and better flow visualization in the gate region. In the new process sequence, the microfluidic chips were fabricated using deposition on a Pyrex glass substrate of a thin-film metal electrode, which was covered with a thin insulating film of silicon dioxide, followed by chemical mechanical polishing prior to bonding to a second glass plate to form closed microchannels. Electrical breakdown of the metal–insulator structures was measured and occurred at 9.6 ± 0.3 MV/cm. Experiments using fluorescent beads to visualize the flow patterns in the microchannel showed that the EOF is linearly dependent on the applied gate voltage. The average EOF could be stopped completely for longitudinal fields of 150 V/cm by applying a gate field of 1.7 MV/cm.

Quantitative measurement of depth–averaged concentration fields in microchannels by means of a fluorescence intensity method

We have inferred and verified an optical measuring technique, based on fluorescence intensity, for the species concentration field in a liquid microchannel flow. In contrast to macroscopic flows, where a light sheet is usually applied, the complete illumination of the measuring volume in the microchannel provides a height-averaged concentration field. The technique was verified with aqueous solutions within a square glass microchannel of 110 μm width. The verification experiments confirm both a good spatial resolution and a good accuracy of even the concentration gradients within a concentration boundary layer.

Potassium chloride nanowire formation inside a microchannel glass array

The synthesis of KCl nanowires has been achieved by atomic layer deposition inside high aspect ratio channels of microchannel glass. The average diameter of the KCl nanowires is 250 nm, with a minimum observed diameter of 50 nm, and lengths up to 5μm. The Cl precursor was TaCl5, while the source of K was determined to be impurities in the microchannel glass substrate. The process for KC1 nanowire formation is a three-step chemical process that simultaneously etches K from the substrate concomitant with the formation of chlorine gas. It is postulated that the curvature of the channels may influence the diameters of the KCl nanowires.

Integrating micromachined fast response temperature sensor array in a glass microchannel

Total glass microdevices have attracted wide interest in the development of micro total analysis systems (μTAS), laser microsurgery, micro heat pipes and microfluidics researches because of the possibility for optical diagnostics and observations. The integration of a detection system, such as integrated sensors into a glass microchannel, however, was difficult due to technology constraints. A microfabrication process integrating a micromachined fast response temperature sensor array inside a glass microchannel is presented. Combining of newly developed two different glass materials anodic bonding, channel etching, fabrication of silicon temperature detectors, makes the fabrication of a glass microchannel with an integrated temperature detector array possible. The implantation process and the channel etching technology were ameliorated to adapt to the new material introduced. The dynamic response of the integrated temperature array has also been calibrated. The response time of the integrated temperature sensor array was examined to be 1.5 μs in the glass microchannel.

Microchannel Arrays in Borophosphosilicate Glass for Photonic Device and Optical Sensor Applications

AbstractThe fabrication of two-dimensional uniform arrays of microchannels in borophosphosilicate glass (BPSG) layers deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The microchannels, with circular cross-sections of 2-3 μm diameter, are formed by depositing specific thicknesses of BPSG over periodic ridge/space templates etched into underlying silica layers using reactive ion etching (RIE). High temperature annealing results in reflow of the BPSG and the formation of uniform circular or cylindrical voids between the template ridges. Control of microchannel size and geometry through process variables is reported, and exploitation of the microfluidic and optical properties of microchannels and integrated waveguides for applications in optical sensing and photonic devices is demonstrated

Shear-driven pumping and Fourier transform detection for on chip circular chromatography applications

A circular, shear-driven pumping system combined with Fourier Transform detection has been developed for the application of chip based cyclic chromatography. Using this system, it is possible to perform an injection of a sample plug into a circular micro-channel and then drive the sample through the channel, using shear flow induced by a rotation stage. High pumping rates at uniform speeds are attainable with this system with very little heat production. Typical pumping rates of up to 1.423 mm s(-1) +/- 2 microm s(-1) were used in experiments although much higher rates >14 mm s(-1) are also possible with this system. Fluorescence detection was used to detect a sample plug of Coumarin dyes, flowing around the channel. A coating of porous polymethacrylate was used to immobilise RP-HPLC beads onto the glass surface and was applied to the glass micro-channel by selective photopolymerisation. This coating acted as a stationary phase and differences in retention time were observed for an injection of Coumarin dyes for different methanol-water, mobile phase ratios. Full sample retention occurred for 30 : 70 (v/v) methanol-water whereas no retention occurred for 92 : 8 (v/v) methanol-water which can be expected for such a reverse phase, open tubular system. Fourier transform detection applied to the fully retained and non-retained cases showed frequency domain data from a single detection point corresponding to that which may be expected from shear flow theory.

Characterization of SU-8 for electrokinetic microfluidic applications

The characterization of SU-8 microchannels for electrokinetic microfluidic applications is reported. The electroosmotic (EO) mobility in SU-8 microchannels was determined with respect to pH and ionic strength by the current monitoring method. Extensive electroosmotic flow (EOF), equal to that for glass microchannels, was observed at pH > or =4. The highest EO mobility was detected at pH > or =7 and was of the order of 5.8 x 10(-4) cm(2) V(-1) s(-1) in 10 mM phosphate buffer. At pH < or =3 the electroosmotic flow was shown to reverse towards the anode and to reach a magnitude of 1.8 x 10(-4) cm(2) V(-1) s(-1) in 10 mM phosphate buffer (pH 2). Also the zeta-potential on the SU-8 surface was determined, employing lithographically defined SU-8 microparticles for which a similar pH dependence was observed. SU-8 microchannels were shown to perform repeateably from day to day and no aging effects were observed in long-term use.

Application of Fluorescence Correlation Spectroscopy for Velocity Imaging in Microfluidic Devices

In this paper we present and demonstrate a technique for mapping fluid flow rates in microfluidic systems with sub-micrometer resolution using confocal microscopy in conjunction with fluorescence correlation spectroscopy (FCS). Flow velocities ranging from approximately 50 microm/s to approximately 10 cm/s can be recorded using fluorescent polymer nanospheres as fluid motion tracers. Velocity profiles and images of the flow in poly(dimethylsiloxane)-glass microchannels are presented and analyzed. Using the method, velocity images along the horizontal (top view) and vertical planes within a microdevice can be obtained. This is, to our knowledge, the first report of FCS for producing velocity maps. The high-resolution velocity maps can be used to characterize and optimize microdevice performance and to validate simulation efforts.

Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass

Ultra-short-pulse lasers have proved to be effective tools for micromachining a wide range of materials. When the ultra-short laser pulse is focused inside the bulk of a transparent medium, nonlinear absorption occurs only near the focal volume that is subjected to high intensity. Three-dimensional structures can be fabricated inside transparent materials by taking advantage of this volumetric absorption. In this paper, femtosecond laser pulses were used to fabricate straight and bent through-channels. Drilling was initiated from the rear surface to preserve consistent absorption of the laser pulse. When the debris was not removed efficiently, variation of the channel diameter and occasional termination of the drilling process were observed. Machining in the presence of a liquid and additional use of ultrasonic wave agitation facilitated the debris ejection. The machined channels had diameters on the order of tens of microns, high aspect ratios, and good wall-surface quality.

Insulator‐based dielectrophoresis for the selective concentration and separation of live bacteria in water

Insulator-based dielectrophoresis (iDEP) was utilized to separate and concentrate selectively mixtures of two species of live bacteria simultaneously. Four species of bacteria were studied: the Gram-negative Escherichia coli and the Gram-positive Bacillus subtilis, B. cereus, and B. megaterium. Under an applied direct current (DC) electric field all the bacterial species exhibited negative dielectrophoretic behavior. The dielectrophoretic separations were carried out in a glass microchannel containing an array of insulating posts. The insulating posts in the microchannel produced nonuniformities in the electric field applied along the channel. Mixtures of two species of bacteria were introduced into the microchannel and the electric field was applied. The bacterial species exhibited different dielectrophoretic mobilities under the influence of the nonuniform field. From these experiments a trapping order was established with E. coli trapping at the weakest applied electric field, while the Bacillus species were trapped at different characteristic threshold fields. At stronger applied electric fields, the two different species of bacteria in the microchannel were dielectrophoretically trapped into two spatially distinct bands. The results showed that iDEP has the potential to selectively concentrate and separate different species of bacteria.