In the present study, a fabrication technique using self-aligned shadow masking was employed to create a state-of-art thermoelectric single-leg array of Antimony telluride (Sb2Te3) thin film via thermal evaporation technique. The thermoelectric (TE) performance of the array was evaluated using an in-house developed measurement setup. The TE characteristics of the developed p-type Sb2Te3 based TEGs with single-leg configurations, having 5-TE legs, exhibits a highest Power factor (PF) of ∼5173 μW/mK2 at RT along with thermoelectric voltage generation of 70 mV. As compared to planar configuration these segmented single-leg array-based TEG of Sb2Te3 exhibit higher efficiency (∼10 %) under a near-ambient temperature gradient. Also, the 3ω-method is utilized to assess the thermal conductivity of fabricated thin films of Sb2Te3, yielding a value of 0.41 Wm⁻1K⁻1. Furthermore, these thermoelectric generators (TEGs) showcase their versatility across various applications, efficiently harnessing near-room temperature waste heat from a range of sources such as tea coasters, the human body, and gas cookstoves into useable energy near room temperature.
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