Focused ion beam chemical vapor deposition (FIB-CVD) processes can be used to fabricate nano-/microstructures by enabling highly localized material deposition. Due to these advantages, the FIB-CVD process has been utilized extensively as a method for material analysis and device fabrication in the fields of nano-/microscale electronics, sensors, drivers, bio, and optics. In this study, we fabricated shape memory alloy (SMA) carbon composites using an FIB-CVD process and performed a micro-tensile test to evaluate the mechanical properties of the fabricated composites. According to the results of the tensile test, the fabricated composite structure had higher stiffness values and lower maximum tensile strength values than general SMA materials. Based on our experimental results, we fabricated an SMA microscale bending actuator by localized carbon block deposition and evaluated the bending characteristics of the microactuator.