Abstract As an emerging cutting-edge integrated circuit technology, Fin Field Effect Transistor (FinFET) has not only successfully broken through the limitations of the 22nm node since its development in 1998, but it still maintains considerable vitality and is developing into smaller sizes. As an improvement over traditional MOSFET technology, FinFET offers many technical advantages, which practically solve the challenges encountered by traditional MOSFET. The FinFET process technology is incompatible with planar MOSFET process technology. Moreover, since the development of Finfet technology, there have been many technical challenges. The first half of this article mainly introduces the differences and advantages between FinFET and traditional Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET), and briefly outlines its manufacturing process. The second half explains the challenges and hopes on the development path of FinFET technology. I believe this article can provide a reference for integrated circuit designers when understanding FinFET technology, and provide guidance and reference for beginners.
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