Fabrication Of Nanofluidic Devices Research Articles

Relationship between Capillary Wettability, Mass, and Momentum Transfer in Nanoconfined Water: The Case of Water in Nanoslits of Graphite and Hexagonal Boron Nitride.

The flow of water confined in nanosize capillaries is subject of intense research due to its relevance in the fabrication of nanofluidic devices and in the development of theories for fluid transport in porous media. Here, using molecular dynamics simulations carried out on 2D capillaries made up of graphite, hexagonal boron nitride (hBN) and a mix of the two, and of sizes from subnanometer to few nanometers, we investigate the relationship between the wettability of the wall capillary, the water diffusion, and its flow rate. We find that the water diffusion is decoupled from its flow properties as the former is not affected either by the height or chemistry of the capillary (except for the subnanometer slits), while the latter is dependent on both. The capillaries containing hBN show a reduced flow rate compared to those that are purely graphitic, likely due to the high friction coefficient between water and hBN. Such resistance to the flow is, however, at its maximum in the smallest capillary and lower for larger ones. Finally, we show that the flow rate values obtained from the Hagen-Poiseuille theory are almost always smaller than those obtained from simulations, indicating that either the slip length or the viscosity of nanoconfined water could be substantially different from the bulk values.

A review on slip boundary conditions at the nanoscale: recent development and applications.

The slip boundary condition for nanoflows is a key component of nanohydrodynamics theory, and can play a significant role in the design and fabrication of nanofluidic devices. In this review, focused on the slip boundary conditions for nanoconfined liquid flows, we firstly summarize some basic concepts about slip length including its definition and categories. Then, the effects of different interfacial properties on slip length are analyzed. On strong hydrophilic surfaces, a negative slip length exists and varies with the external driving force. In addition, depending on whether there is a true slip length, the amplitude of surface roughness has different influences on the effective slip length. The composition of surface textures, including isotropic and anisotropic textures, can also affect the effective slip length. Finally, potential applications of nanofluidics with a tunable slip length are discussed and future directions related to slip boundary conditions for nanoscale flow systems are addressed.

Nanofluidics for Gas Separation Applications: The Molecular Dynamics Simulation Perspective

ABSTRACT Since past decades, membrane science and technology have received great attention in academia and practice because of their potential for industrial applications. A diverse range of industrial applications has been benefited from this technology thanks to the advances in membrane science. Membranes are of paramount importance in chemical technology and play a key role in a broad range of applications.Membranes incorporating nanosize pores or channels have a tremendous contribution to membrane science discipline, particularly in gas separation technologies. Performing pore-level modeling with the help of computer simulation opens a route to membrane characterization in high accuracy and less observational. By utilizing molecular dynamics simulations, one can provide a fundamental understanding of the static and dynamic features of membranes at a molecular scale. In this work, we have reviewed the recent advances in nanofluidics for gas separation applications, with a major focus on the theoretical literature discussing the gas molecular transport mechanisms through the carbon-based nanopores. Describing the nanofluidics systems, solid-state nanopores, fabrication of nanofluidic devices, pore generation on graphene nanosheets, and pore-level flow modeling, this article expects to provide a platform for understanding the permeation and separation of gases across a variety of nanopores and attracting more attention of audiences from industry and academia.

Electrokinetic identification of ribonucleotide monophosphates (rNMPs) using thermoplastic nanochannels

With advances in the design and fabrication of nanofluidic devices during the last decade, there have been a few reports on nucleic acid analysis using nanoscale electrophoresis. The attractive nature of nanofluidics is the unique phenomena associated with this length scale that are not observed using microchip electrophoresis. Many of these effects are surface-related and include electrostatics, surface roughness, van der Waals interactions, hydrogen bonding, and the electric double layer. The majority of reports related to nanoscale electrophoresis have utilized glass-based devices, which are not suitable for broad dissemination into the separation community because of the sophisticated, time consuming, and high-cost fabrication methods required to produce the relevant devices. In this study, we report the use of thermoplastic nanochannels (110 nm x 110 nm, depth x width) for the free solution electrokinetic analysis of ribonucleotide monophosphates (rNMPs). Thermoplastic devices with micro- and nanofluidic networks were fabricated using nanoimprint lithography (NIL) with the structures enclosed via thermal fusion bonding of a cover plate to the fluidic substrate. Unique to this report is that we fabricated devices in cyclic olefin copolymer (COC) that was thermally fusion bonded to a COC cover plate. Results using COC/COC devices were compared to poly(methyl methacrylate), PMMA, devices with a COC cover plate. Our results indicated that at pH = 7.9, the electrophoresis in free solution resulted in an average resolution of the rNMPs >4 (COC/COC device range = 1.94 – 8.88; PMMA/COC device range = 1.4 – 7.8) with some of the rNMPs showing field-dependent electrophoretic mobilities. Baseline separation of the rNMPs was not possible using PMMA- or COC-based microchip electrophoresis. We also found that COC/COC devices could be assembled and UV/O3 activated after device assembly with the dose of the UV/O3 affecting the magnitude of the electroosmotic flow, EOF. In addition, the bond strength between the substrate and cover plate of unmodified COC/COC devices was higher compared to PMMA/COC devices. The large differences in the electrophoretic mobilities of the rNMPs afforded by nanoscale electrophoresis will enable a new single-molecule sequencing platform we envision, which uses molecular-dependent electrophoretic mobilities to identify the constituent rNMPs generated from an intact RNA molecule using a processive exonuclease. With optimized nanoscale electrophoresis, the rNMPs could be identified via mobility matching at an accuracy >99% in both COC/COC and PMMA/COC devices.

Multi-step proportional miniaturization to sub-micron dimensions using pre-stressed polymer films.

The ability to define patterns and fabricate structures at the nanoscale in a scalable manner is crucial not only in integrated circuit fabrication but also in fabrication of nanofluidic devices as well as in nano and micromechanical systems. Top down fabrication at the nanoscale often involves fabrication of a master using a direct write method and then its replication using a variety of methods such as by hot embossing, nanoimprint lithography, or soft lithography. Nevertheless, fabrication of the master is a time consuming and expensive process. One interesting approach is to define patterns at larger dimensions on pre-stressed films using methods such as xurography or lithography which are scalable and heat them to de-stress and shrink which can reduce the size proportionally. Although attractive, suitable fabrication processes that can perform iterative shrinking of patterns over several cycles and into the nanoscale have not been demonstrated. Here, we demonstrate a fabrication process that is capable of accurately producing patterns and features over several cycles of miniaturization and shrinking to achieve resolution in the order of 100 s of nanometers. In this approach, a pattern transfer method is developed by combining soft imprint lithography followed by reactive ion etching, both of which are scalable processes, to transfer the original patterns into a shrinkable polymer film. The patterned shrinkable film is heated to allow thermal shrinking. As a result, the pattern size was decreased by 60% of the original size in a single cycle. This reduced pattern was used as the master for the next cycle and three cycles of miniaturization was demonstrated. Sub-micron patterns of 750 nm were generated by the multi-step miniaturization method, showing approximately 20× reduction in size of the original patterns. Finally, these patterns are transferred into features on a silicon substrate to demonstrate its application in semiconductor microfabrication or its use as a master template for microsystems applications.

Polydopamine meets solid-state nanopores: a bioinspired integrative surface chemistry approach to tailor the functional properties of nanofluidic diodes.

The ability to modulate the surface chemical characteristics of solid-state nanopores is of great interest as it provides the means to control the macroscopic response of nanofluidic devices. For instance, controlling surface charge and polarity of the pore walls is one of the most important applications of surface modification that is very relevant to attain accurate control over the transport of ions through the nanofluidic architecture. In this work, we describe a new integrative chemical approach to fabricate nanofluidic diodes based on the self-polymerization of dopamine (PDOPA) on asymmetric track-etched nanopores. Our results demonstrate that PDOPA coating is not only a simple and effective method to modify the inner surface of polymer nanopores fully compatible with the fabrication of nanofluidic devices but also a versatile platform for further integration of more complex molecules through different covalent chemistries and self-assembly processes. We adjusted the chemical modification strategy to obtain various configurations of the pore surface: (i) PDOPA layer was used as primer, precursor, or even responsive functional coating; (ii) PDOPA layer was used as a platform for anchoring chemical functions via the Michael addition reaction; and (iii) PDOPA was used as a reactive layer inducing the metallization of the pore walls through the in situ reduction of metallic precursors present in solution. We believe that the transversal concept of integrative surface chemistry offered by polydopamine in combination with the remarkable physical characteristics of asymmetric nanopores constitutes a new framework to design multifunctional nanofluidic devices employing soft chemistry-based nanofunctionalization techniques.

Review article: Fabrication of nanofluidic devices.

Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed.

Single-file diffusion through inhomogeneous nanopores

Strict one-dimensional diffusion, due to geometrical confinement in a nanopore, of an assembly of particles forbids overtaking by each other, giving rise to single-file diffusion (SFD). Smooth carbon nanotube is the epitome of SFD. However, natural nanoporous materials are far from smooth; morphologically, the nanopores' inner surface may provide an inhomogeneous environment for diffusion to occur, giving rise to subnormal diffusion even for an isolated particle diffusing through this fractal landscape. The realm of fractional diffusion (FD) falls under this paradigm. In order to understand the characteristics of SFD through inhomogeneous nanopores, here, we introduce a fractional SFD (FSFD) formalism that deals with a combination of these two phenomena, namely, SFD of particles, each of which are moving subdiffusively in one dimension. For an infinite system, we obtain the mean square displacement (MSD) of the combined entity and our analysis is based on FD equation for particles moving in concert where the single-file correlation is established through reflection principle. For a finite system, we calculate the transport probabilities based on continuous time random walk model. While both the diffusion mechanisms (SFD and FD) acting separately are responsible for slow dynamics at long times, their combined effect leads to ultraslow diffusion. For example, while the long time asymptote of MSD of SFD scales as sqr rt of t, that for FSFD is sqr rt of t(alpha), where alpha is the measure of the extent of inhomogeneity. These findings, which are believed to occur in a natural inhomogeneous nanopore, is also important for design and fabrication of nanofluidic devices through which the fluid delivery can be engineered.

Design and fabrication of nanofluidic devices by surface micromachining

Using surface micromachining technology, we fabricated nanofluidic devices with channelsdown to 10 nm deep, 200 nm wide and up to 8 cm long. We demonstrated that differentmaterials, such as silicon nitride, polysilicon and silicon dioxide, combined with variationsof the fabrication procedure, could be used to make channels both on silicon and glasssubstrates. Critical channel design parameters were also examined. With the channels asthe basis, we integrated equivalent elements which are found on micro total analysis(μTAS) chips for electrokinetic separations. On-chip platinum electrodes enabled electrokineticliquid actuation. Micro-moulded polydimethylsiloxane (PDMS) structures bonded to thedevices served as liquid reservoirs for buffers and sample. Ionic conductance measurementsshowed Ohmic behaviour at ion concentrations above 10 mM, and surface charge governedion transport below 5 mM. Low device to device conductance variation (1%) indicatedexcellent channel uniformity on the wafer level. As proof of concept, we demonstratedelectrokinetic injections using an injection cross with volume below 50 attolitres(10−18 l).

Fabrication of nanofluidic devices in glass with polysilicon electrodes

In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

Fabrication of nanofluidic devices using glass-to-glass anodic bonding

In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one or two photo-patterning steps, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer deposited by low-pressure chemical vapor deposition (LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.