Accurate detection is the foundation of haze governance. The existing particle concentration detection methods and instruments have many shortcomings, such as complex structure, high cost, easy blockage, short life, and significant impact of environmental changes. Therefore, this paper proposes a silicon micropillar three-electrode ionization particle sensor based on the gas discharge principle and studies the sensor's sensitivity to PM2.5 particles. Three-electrode comprises a cathode with micro silicon pillars grown on the surface, an extracting electrode, and a collecting electrode. It shows that the cathode current of the sensor increases linearly with extraction voltage and nonlinearly with temperature. As the cathode material of the sensor, the silicon micropillar is compared with the carbon nanotube to solve the burn problem of the nanotube rising from positive ions bombardment during gas discharge. The collecting current of the sensor shows a decreasing trend with the increase in particle concentration. The collecting current and sensitivity of the sensor are much higher in radio frequency excitation than in direct current excitation. The sensor developed in this paper displays the advantages of simple technology, high integration, low cost, and high sensitivity, and it exhibits great application potential.
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