The step structure transition between a regular step and a bunched step on vicinal Si(1 1 1) surfaces induced by DC is studied by the kinetic Monte Carlo simulation in a terrace-adatom-step-kink (TASK) model. In the TASK model, effective force due to DC is taken into account explicitly on the mass transport of Si adatoms. In the diffusion-limited regime corresponding to the experimental temperature range II, step bunching is induced by step-up force and in-phase wandering of a regular step is formed by step-down force. The in-phase wandering of a regular step is formed by nucleation growth mode and the amplitude of wandering grows with time in proportion to t . The period of in-phase wandering decreases as the effective force increases, consistent with the recent experimental results.
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