Polyether ether ketone (PEEK) has been broadly utilized in aerospace due to its excellent properties. Nevertheless, when applied as sealing components in harsh environments, virgin PEEK still faces defects in mechanical behavior and wear resistance. To address these issues, the deposition of diamond-like carbon (DLC) films has been employed as a viable solution. In this study, the DLC film with plasma-induced transition layer was fabricated on PEEK via direct current magnetron sputtering technology. Compared with previous studies, the evolutions of interfacial structures and plasma-induced layer were investigated, and their roles on the tribological performance of PEEK/DLC were analyzed in detail. Results show that an increase in etching duration promotes the formation of cauliflower pits and enhances the hardness of plasma-induced layer on PEEK, which are facilitated by high-energy plasma bombardment. When the etching time comes to 20 min, these features endow PEEK/DLC with good interfacial adhesion and mechanical properties. Besides, the cauliflower pits could fill debris and help to form graphitized transfer films. The friction coefficient and wear rate of PEEK/DLC both exhibit a declining trend as the etching duration prolongs. Notably, compared to virgin PEEK, the tribological performance of PEEK/DLC with 20-min etching displays lower friction coefficient of 0.2 and lower wear rate of 1.22 × 10−8 mm3/N·m. Finally, a wear failure mechanism for PEEK/DLC with 20-min etching was proposed. This provides a simple and effective approach to improve the tribological behavior of carbon-based films applied on PEEK, it also assists in the development of efficiently wear-resistant materials for aerospace.
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