Diamond coated cutting tools are applied for machining difficult-to-machine materials of titanium alloys. However, the temperature field uniformity needs to be further improved for the mass production of diamond coated tools using the hot filament chemical vapor deposition (HFCVD) method. In this paper, the tools temperature distribution is simulated by the finite volume method (FVM) during the deposition of diamond coatings. An optimization method of deposition setting with fine filaments in dense arrangement (FFDA) is proposed, and the temperature distributions of the tools under the coarse filament in sparse arrangement (CFSA) and FFDA are simulated to systematically elucidate the effects of fine filament densification. Subsequently, the different hot filament arrangements are adopted to mass production experiment for deposition of micro/nano composite diamond (MCD/NCD) coatings on WC-6%Co cutting tools. In addition, the cutting experiments on titanium alloys are conducted using diamond coated tools, and the cutting performance of tools at different locations is evaluated. The results indicate that the FFDA method can improve the temperature field uniformity of mass-produced diamond coated cutting tools, and the cutting tools have better consistency in surface morphology, thickness, chemical composition, surface roughness and cutting performance.