Molecular dynamics simulations are performed to investigate the microscopic mechanism of diamond abrasive grain (DAG) polishing on the surface of single crystal copper (SCC). In this paper, the polishing parameters including the incident angle and the polishing force applied to the DAG are varied to analyze the surface morphology, friction and subsurface damage state of the workpiece. The polishing process on scratched SCC surface was also investigated. It is found that variations in the incident angle and the polishing force have significant effects on the swarf formation and internal structure of the workpiece. At small incident angle, unstable DAG motion and obvious friction fluctuations is observed. As the incident angle becomes larger, the sliding of the DAG on the workpiece surface becomes stable, and the friction force undergoes transition from the rapid growth to the stabilization phase. However, the fluctuation of dislocation density increases with the incident angle. As the polishing force increases, the sliding distance required to reach the peak of dislocation density becomes longer. In addition, the friction as well as the dislocation density show different characteristics on the scratched surface compared to the smooth surface.
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