Piezoelectric actuators are widely used in precision equipment because of their rapid response, high motion accuracy, and immunity to electromagnetic interference. However, the multi-scale characteristics of contact at the transmission interface between the stator and mover, along with stick-slip motion produce complex nonlinear behaviors in the mover system, resulting in difficulties in solving the dynamic response of the mover. To address this, a multi-asperity line contact mechanics model considering the substrate deformation and roughness is deduced based on the statistical approach to reflect the contact effect between the transmission interface more accurately. Moreover, the contact model is further extended, overcoming the asperity contact limit, to apply to slight and very heavy loads by introducing the Hertz solution. Furthermore, the stick-slip motion considering the tangential stiffness of the interface is solved through the iteration process to determine the stick and slip region. Newmark-β method is used to obtain the dynamic response of the mover when the normal and tangential contact stresses are calculated. Besides, a classical traveling wave piezoelectric actuator is selected for experimental verification of the proposed model. Numerical and experimental results show that the proposed model can effectively calculate the normal contact stress distribution and capture the evolution of stick-slip motion. The predicted torque-velocity curves have good agreement with the experimental values and the accuracy is higher than previous models. In addition, the proposed model can well predict the transient start-up characteristics of the mover. This research provides a theoretical reference for the modelling and dynamic response prediction of piezoelectric actuators, especially for small-size actuators.
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