Gas-phase microwave plasma-assisted synthesis of freestanding graphene is a promising route to produce high-quality graphene flakes. However, a comprehensive understanding of the gas-phase kinetics that is required to advance production rates and yields is still lacking. Here, we use line-of-sight Fourier-transform infrared (FTIR) absorption spectroscopy as an in situ diagnostic to measure gaseous species formed during graphene synthesis, thereby elucidating the chemical kinetics mechanism. Different carbonaceous precursors that lead to the formation of either few-layer graphene flakes or soot-like particles are examined, and the results are compared with numerical simulations and mass spectrometry measurements. Quantitative FTIR measurements show a correlation between concentration of atomic carbon and hydrogen in the post-plasma region and particle morphology. Lower carbon and higher hydrogen concentrations lead to graphene formation, while higher carbon and lower hydrogen concentrations shift the reaction toward soot-like particles. We also investigate how the precursor chemical composition, precursor flowrate, and delivered microwave power affect the carbon concentration in the post-plasma region, thus enabling to control particle morphology.
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