In a beamforming circuit for a modern broadband phased-array system, high accuracy and compactness have received sufficient attention as they are directly related to side lobe level and fabrication cost, respectively. In order to meet the low phase error required, this paper proposed an ultra-broadband 6-bit digital step switched-type attenuator (STA) with capacitive/inductive compensation networks. Compared to the conventional methods, the proposed technique employs an improved simplified T-structure with capacitive compensation networks, which simultaneously achieves low insertion loss and high-accuracy amplitude/phase control. In addition, on-chip level shifting circuit is integrated to avoid complex control schemes. The strategy of prioritizing return loss is adopted to alleviate the performance degradation caused by impedance mismatch after cascade. As a proof-of-principle demonstration, a wideband 6-bit STA with core area of only 0.5 mm × 1.8 mm was designed via 0.15-micrometer GaAs pHEMT technology. It exhibits ultra-broadband operation with a 31.5 dB amplitude tuning range and a 0.5 dB tuning step. The insertion loss of the reference state is 4-5.3 dB. The return loss is better than 15 dB for all the 64 states. The RMS amplitude and phase errors are less than 0.2 dB and 2° over the 10 to 20 GHz.
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