The optical emission spectroscopy technique is used to determine the vibrational temperature of the second positive band system, N_{2} (C,upsilon^{^{prime}} - B,upsilon^{^{primeprime}}) in the wavelength range 367.1–380.5 nm by using the line-ratio and Boltzmann plot methods. The electron temperature is evaluated from the intensity ratio of the selected molecular bands corresponding to N_{2}^{ + } (B,upsilon - X, upsilon^{^{prime}} , 391.44 nm), and, N_{2} (C,upsilon^{^{prime}} - B,upsilon^{^{primeprime}}, 375.4 nm) transitions, respectively. The selected bands have a different threshold of excitation energies and thus serve as a sensitive indicator of the electron energy distribution function (EEDF). The electron density has been determined from the intensity ratio of the molecular transitions corresponding to N_{2}^{ + } (B,upsilon - X, upsilon^{^{prime}} , 391.44 nm), and, N_{2} (C,upsilon^{^{prime}} - B,upsilon^{^{primeprime}}, 380.5 nm) for different levels of pressure and radio frequency power. The results show that the vibrational temperature decreases with increasing nitrogen fill pressure and radio frequency power. However, the electron temperature increases with radio frequency power and reduces with fill pressure. The electron density increases both with nitrogen fill pressure and radio frequency power that attributes to the effective collisional transfer of energy producing electron impact ionization. Plasma parameters show a significant dependence on discharge conditions and can be fine-tuned for specific surface treatments.Article HighlightsSpectrum analysis of RF-driven nitrogen plasma for varying discharge conditionsEvaluation of vibrational temperature using line-ratio and Boltzmann plot methodsComparison of vibrational temperatures for line-ratio and Boltzmann plot methodsEvaluation of electron temperature and density using the intensity-ratio of bandsCorrelation of temperature and density with varying fill pressure and RF power
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