Half-metallic Co2FeAl Heusler alloy thin films with various thickness were prepared by MBE method and its magnetic and crystalline properties were investigated. At the thickness of 20 nm and above, good magnetic properties and high B2-order parameter was obtained. In addition, magnetic damping constant was evaluated from peak-to-peak linewidth measured by FMR and ultra-low magnetic damping constant below 0.001 was obtained at the film thickness of 30 nm. These results are thanks to the excellent half-metallicity in the Co2FeAl films prepared by MBE.
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