Ba ferrite layers were deposited on ZnO(001), Au(111), Pt(111), and Pt(100) underlayers using facing target sputtering, and the surface smoothnesses, crystal orientations, and magnetic characteristics were compared. The center-line average roughness R, was smallest at 1.7 nm for a Ba ferrite layer deposited on a Pt(111) underlayer. Ba ferrite layers deposited on underlayers other than Pt(100) exhibited preferential c-axis orientation and their magnetization was mainly oriented perpendicular to the film plane. The smoothest surface, coercivity, as well as high perpendicular and low in-plane coercivity was attained for a Ba ferrite layer deposited on a Pt(111) underlayer.
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