CdO and CdO:F films were prepared by ultrasonic spray pyrolysis method on glass substrates at temperature of 250 ± 5 °C. The structural and optical properties of pure and fluorine doped CdO films were characterized by XRD measurements and UV–VIS spectra, respectively. X-ray diffraction patterns show that the films have the polycrystalline structure with preferred orientation along (111) plane. Scherrer Method and Williamson Hall Method were used for calculating of the crystalline grains and strains of films. It is observed that the films at 8% F doped has better crystallinity level, and F doping decreases the defects in CdO films and improves crystallite quality. By UV–VIS spectra, it is revealed that the film with 8% F doped has a high transmittance about 65% in the visible region together with a direct band gap of 2.70 eV. Thicknesses, refractive indices and extinction coefficient values are determined by spectroscopic ellipsometry technique using Cauchy–Urbach model.
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