We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum-aluminum oxide-aluminum (Al-${\mathrm{AlO}}_{x}$-Al) parallel-plate capacitors. The size of the resonators is only $0.04\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}$, which is more than one order smaller than the typical size of coplanar resonators ($1\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}$). The fabrication method we develop easily fits into the standard superconducting qubit fabrication process. We obtain capacitance per area $14\phantom{\rule{0.2em}{0ex}}\mathrm{fF}/\text{\ensuremath{\mu}}{\mathrm{m}}^{2}$ and the internal quality factor $1\ifmmode\times\else\texttimes\fi{}{10}^{3}$--$8\ifmmode\times\else\texttimes\fi{}{10}^{3}$ at the single-photon level. Our results show that such devices based on Al-${\mathrm{AlO}}_{x}$-Al capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0\ensuremath{-}\ensuremath{\pi}$ qubit.
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