Highly c-axis oriented neodymium-modified bismuth titanate (Bi 4− x Nd x Ti 3O 12) films having a variety of neodymium (Nd) contents were successfully grown on Pt/TiO 2/SiO 2/Si(100) substrates using metal–organic sol decomposition. After systematically examining ferroelectric properties of the c-axis oriented Bi 4− x Nd x Ti 3O 12 film capacitors as a function of the Nd-content, we concluded that the capacitor with x=0.85 had the largest remanent polarization. The Bi 3.15Nd 0.85Ti 3O 12 capacitor fabricated using a top Pt electrode showed well-saturated polarization-electric field (P-E) switching curves with the remanent polarization ( P r) of 51 μC/cm 2 and the coercive field ( E c) of 99 kV/cm at an applied voltage of 10 V. More importantly, the Pt/Bi 3.15Nd 0.85Ti 3O 12/Pt capacitor exhibited fatigue-free behavior up to 4.5×10 10 read/write switching cycles at a frequency of 1 MHz. The capacitor also demonstrated an excellent charge-retaining ability and a strong resistance against the imprinting failure.