Medium energy ion and atom backscattering from solids has been studied by means of transport theory. The analytical results have been compared with computer simulations using the binary encounter approximation (TRIM and MARLOWE). In the analytical and the computer simulation approaches identical realistic potentials were employed to describe elastic collisions of light projectiles with target atoms. Electronic energy losses were accounted for by the formula of Lindhard and Scharff. The analytical approach is based on the solution of the transport equation with appropriate boundary conditions. A simple analytical expression for the total reflection coefficient has been derived under the assumption that the majority of backscattered particles leave the target without losing a considerable amount of their kinetic energy. The backscattering coefficient is shown to be a universal function of the angle of incidence and the ratio of the linear range and the transport mean free path of a projectile.
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