In this letter, a new 90° coupler with a symmetric coupled-line structure featuring the use of the tuning multiple floating metals technique is designed, analyzed, and verified for subterahertz (THz) applications; this new coupler was fabricated on the standard Taiwan Semiconductor Manufacturing Company (TSMC) 0.18-μm 1P6M CMOS process. With the proposed structure, the impedances of even and odd modes can be designed individually to simultaneously optimize the performance in terms of insertion loss, phase balance, amplitude balance, isolation, and reflection coefficients. The bandwidths of phase imbalance (± 3°) and amplitude imbalance (± 1 dB) are 162 and 100 GHz, respectively. Reflection coefficients less than -20 dB are reached at 0.2-184 GHz, and isolation higher than 20 dB is from 0.2 to 200 GHz.
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