Nanolithography by local oxidation of dodecyl‐terminated silicon using a scanning probe microscope is a practical method for the generation of silicon oxide nanostructures on a well‐defined substrate. We report on the functionalization of such structures by the selective binding of the cationic dye cresyl violet by electrostatic interactions. The bound dye molecules could be optically excited and showed a clear luminescence emission. Additionally to the fluorescence light from monomers, an additional blue‐shifted emission was found. This emission is an indication of the formation of charge‐transfer complexes between the cationic dye molecules and anions in the oxide nanostructures. AFM topography and fluorescence image of selectively cresyl violet modified silicon oxide nanostructures on alkyl‐terminated silicon surfaces.
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