Abstract
ZnO thin films deposited on Si substrate were irradiated by nanosecond KrF excimer laser at 248nm wavelength. To investigate the mechanism of the laser interaction with ZnO film, a focused laser beam has been used. The effect of laser energy on the film has been systemically investigated by scanning electron microscopy, Raman spectral and X-ray photoelectron spectroscopy. An obvious laser thermal effect has been observed at the incident laser power intensity less than 2.5J/cm2. Further, with the increase of laser power intensity, novel ZnO nano-platelets have been found on the surface because laser induced plasma caused electron–ion emission from the surface. Our results show that the higher intensity of laser power distributes abundance of ZnO nano-platelets and nano-platelets have potential applications in electronics, optoelectronics, and spintronics.
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