Abstract
Spark plasma sintering (SPS) of AlN ceramics were carried out with Y₂O₃ as sintering additive at a sintering temperature 1,550~1,700℃. The effect of Y₂O₃ addition on sintering behavior and thermal conductivity of AlN ceramics was studied. Y₂O₃ added AlN showed higher densification rate than pure AlN noticeably, but the formation of yttrium aluminates phases by the solid-state reaction of Y₂O₃ and Al₂O₃ existed on AlN surface could delay the densification during the sintering process. The thermal conductivity of AlN specimens was promoted by the addition of Y₂O₃ up to 3 wt% in spite of the formation of YAG secondary phase in AlN grain boundaries because Y₂O₃ addition could reduced the oxygen contents in AlN lattice which is primary factor of thermal conductivity. However, the thermal conductivity rather decreased over 3 wt% addition because an immoderate formation of YAG phases in grain boundary could decrease thermal conductivity by a phonon scattering surpassing the contribution of Y₂O₃ addition.
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