Abstract
Developing super-resolution scanning and reconstruction method on the existing hardware can improve imaging performance and saving the cost to upgrade hardware. In this paper, a super-resolution scanning mode based on sub-pixel scanning is designed and a series of low-resolution images of the sample is acquired through modulating the position of the sample. Then, the point spread function derived by processing the edge spread function is employed to the image restoration of the low-resolution image series. Finally, super-resolution reconstruction algorithm based on POCS is used to reconstruct super-resolution images. The experiments conducted on the high-resolution X-ray microscope equipped with a 10 times optical lens coupling detector show that the contrast-to-noise ratio increases about 20%, the spatial resolution has been improved about 0.2 μ m (about 15%), the detail resolution can exceed the limits of pixel size of the detector and more details are seen than low-resolution images. The experiment's results illustrate that the super-resolution technique has great potential in improving the spatial resolution of the high-resolution X-ray microscope. © 2017, Science Press. All right reserved.
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