Abstract

GaSb-SiO2 composite films were fabricated by radio-frequency magnetron co-sputtering. Transmission electron microscope (TEM) results exhibit that the GaSb nanoparticles were uniformly dispersed in SiO2 matrices. The sizes of nanoparticles are in the range of 4-10 nm. X-ray photoelectron spectroscopy (XPS) analysis confirms the high purity of GaSb nanoparticles contained in the SiO2 matrices and shows that the GaSb and SiO2 exist in nonstoichiometry in the composite films due to the strong affinity of Sb and Si with oxygen. Room temperature optical transmission spectra show a very large blue shift of about 2.76 eV with respect to that of bulk GaSb, suggesting the existence of quantum size effects.

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